SiCNO-based piezoresistive thin film system and preparation method thereof

Abstract

The invention discloses a SiCNO-based piezoresistive thin film system and a preparation method thereof. The SiCNO-based piezoresistive thin film system comprises a stainless steel substrate, a silicon nitride thin film layer, a SiBCN thin film layer and a Co-doped SiCNO thin film layer are sequentially arranged on the stainless steel substrate, and an electrode is arranged on the Co-doped SiCNO thin film layer through a SiAlCN thin film layer. A stainless steel sheet at the bottommost layer serves as a substrate of a whole film system, a silicon nitride thin film prepared on the substrate serves as an insulating layer, a Co-doped SiCNO thin film serves as a main pressure-sensitive material, and a SiBCN thin film is arranged between the Co-doped SiCNO thin film and a silicon nitride insulating layer to serve as a middle layer. The silicon nitride thin film layer, the SiBCN thin film layer and the Co-doped SiCNO thin film layer form a multi-layer thin film structure, so that a good mechanical gradient is formed, the SiAlCN thin film layer is arranged between the Co-doped SiCNO thin film layer and the electrode, and the adhesiveness between a piezoresistive thin film system and the electrode is enhanced; experimental test results show that the SiCNO-based piezoresistive thin film system has excellent piezoresistive characteristics and mechanical stability.

Description

technical field [0001] The invention relates to the technical field of multilayer thin film electrodes, in particular to a SiCNO-based piezoresistive thin film system and a preparation method thereof. Background technique [0002] More and more fields such as aerospace, automobile, oil exploration, military and so on urgently need pressure sensors with good performance under high temperature conditions. In civilian use, it can be used to measure the pressure in high-temperature oil wells, coal-fired gas boilers, high-temperature reaction vessels and various engine cavities. For example, the internal working temperature of the aero-engine combustion chamber is generally above 1000 ° C. The research on high-temperature pressure sensors is very important for improving energy efficiency. It is very important to reduce harmful emissions. In the military, it can be used for pressure measurement in heat-resistant cavities such as ship engines, rockets, missiles, and satellites. A...

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Problems solved by technology

At present, the research on the piezoresistive properties of PDC materials is still in its infancy at home and abroad, and the research on the preparation of PDC piezoresistive films by magnetron sputtering has not been reported yet.

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