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A kind of preparation method of soft-edge diaphragm resistant to laser damage

A soft-edge diaphragm and anti-laser technology, applied in laser welding equipment, welding equipment, manufacturing tools, etc., can solve problems such as the inability to economically and efficiently prepare soft-edge diaphragms with high resistance to laser damage, and achieve the threshold of laser damage. High efficiency, novel ideas, and the effect of solving thermal stress problems

Active Publication Date: 2021-12-03
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the technical problem that the existing soft-edge diaphragm preparation method cannot economically and efficiently prepare a soft-edge diaphragm with high resistance to laser damage, the present invention provides a preparation method for a soft-edge diaphragm resistant to laser damage

Method used

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  • A kind of preparation method of soft-edge diaphragm resistant to laser damage
  • A kind of preparation method of soft-edge diaphragm resistant to laser damage
  • A kind of preparation method of soft-edge diaphragm resistant to laser damage

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] A method for preparing a laser-resistant soft-edge diaphragm, which is carried out according to the following steps:

[0037] S1: Debug Focus CO 2 The power and pulse width of the laser pulses enable the focused CO 2 Laser pulse peak power 600W, pulse width 4μs, spot 1 / e 2 220 μm in diameter, irradiated on the surface of fused silica, which strongly absorbs CO 2 Rapid heating with laser energy produces phase explosion ablation, forming crack-free ablation pits. See figure 1 and figure 2 , From the micrograph of the ablation pit point, it can be observed that the irregular surface formed by the liquid splashing of the phase explosion is obvious, with a diameter of 120 μm and a depth of 5 μm.

[0038] S2: Detection of residual stress at the ablation pit point by photoelastic method.

[0039] Figure 4 and Figure 6 The dark field image of the residual stress distribution at the traditional ablation point on the surface of fused silica measured by photoelasticity me...

Embodiment 2

[0044] In this embodiment, step S1 and step S2 are the same as embodiment 1, the difference is:

[0045] S3: The density of ablation pits at the edge of the soft-edged aperture of a round hole with an aperture of 10mm gradually increases toward the direction away from the edge (that is, the closer to the edge of the soft-edged diaphragm, the greater the density of ablation pits, and the farther away from the soft-edged diaphragm the density of ablation pits increases. The edge of the edge diaphragm, the smaller the density of ablation pits), the distribution of the density of ablation pits is a 10-order super-Gaussian distribution, and the density of ablation pits in the center of the aperture of the soft edge diaphragm of the round hole changes from 50 in the center to The % duty cycle is distributed along the Gaussian diameter, and the scanning galvanometer is used to make the edge ablation pit point, and each ablation pit point is made according to the method of step S1, and...

Embodiment 3

[0049] In this embodiment, step S1 and step S2 are the same as embodiment 1, the difference is:

[0050] S3: The density of ablation pits on the edge of the soft-edged aperture of a rectangular hole with a length of 10 mm and a width of 2 mm gradually increases toward the direction away from the edge (that is, the closer to the edge of the soft-edged aperture, the greater the density of ablation pits, The farther away from the edge of the soft-edged aperture, the smaller the density of ablation pits), the edge distribution in the length direction is the 10th-order super-Gaussian distribution, and the edge distribution in the width direction is the 2nd-order super-Gaussian distribution, and the scanning galvanometer is used to make the edge burning Each ablation pit point is made according to the method of step S1, and the dark field image of the soft edge diaphragm of the rectangular hole is as follows Figure 11 shown.

[0051] S4: Use the spot quality analyzer to test the s...

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Abstract

The invention discloses a method for preparing a laser-damaged soft-edged diaphragm, which is carried out according to the following steps: S1: debugging focusing CO 2 The power and pulse width of the laser pulse, using focused CO 2 Laser pulses irradiate the surface of fused silica to form crack-free ablation pits; S2: use photoelastic method to detect whether the residual stress of ablation pits is 0; S3: use the arrangement density of pits to control the light transmittance , so that the soft-edged aperture edge CO 2 The density of the laser phase explosion ablation pits increases gradually towards the edge of the soft-edged aperture. Using the above technical solutions, the prepared soft-edge aperture has a high laser damage threshold and is cost-effective, which overcomes the problem of high cost of producing a soft-edge aperture with ultrashort laser pulses, and solves the problem of CO 2 The thermal stress problem of laser-fabricated soft-edge diaphragms can not only prepare traditional round holes, square holes and rectangular hole soft-edge diaphragms, but also can flexibly and conveniently prepare rings, square rings and soft-edge diaphragms with central transmittance modulation Wait.

Description

technical field [0001] The invention relates to the technical field of optical element preparation, in particular to a method for preparing a laser-damaged soft-edge aperture. Background technique [0002] Soft-edged apertures are widely used in laser beam shaping. Its typical feature is that the edge transmittance gradually changes, which can effectively suppress the edge diffraction modulation effect of traditional hard-edged apertures and ensure the uniformity of the laser beam within a certain propagation distance. In the powerful laser device of the multi-stage amplification system, the soft-edge diaphragm is generally used to obtain the super-Gaussian top-hat beam, uniformly irradiate the entire effective aperture of the amplifier, and realize the full use of the energy storage of the amplifier. In addition, it is also used for inter-stage aperture matching. At present, devices with soft-edge diaphragm function are mainly used for beam shaping at the front end of the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/362B23K26/70B23K26/073
CPCB23K26/073B23K26/362B23K26/702
Inventor 张传超张丽娟蒋晓龙廖威陈静方振华王海军栾晓雨蒋晓东朱启华
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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