Array tubular anode assisted laser electrochemical combined machining method and device based on variable electric field

Abstract

The invention discloses an array tubular anode assisted laser electrochemical combined machining method and device based on a variable electric field, and relates to the field of micromachining in a non-traditional machining technology. According to the method, an electrochemical loop is formed between tubular anodes and a cathode substrate, the input voltage of a single tubular anode can be adjusted through a voltage adjusting controller, laser penetrates through a liquid crystal mask plate to enter the tubular anodes distributed in an array mode, and a computer controls the liquid crystal mask plate to display a gray level image; the outline of the laser reaching the processing deposition area is the same as the image on the liquid crystal mask plate; in a laser irradiation micro-area, due to the heat effect and the force effect of laser, and the electro-deposition rate is greatly increased; and machining of the whole micro parts or array micro structures is achieved through the array of the tubular anodes. The method is suitable for machining of the micro parts or the array micro structures with complex continuous structures, and is applied to the machining fields of micro manufacturing of micro machinery, micro electro mechanical systems, metal forms, medical treatment, electronics, spaceflight and the like.

Description

technical field [0001] The invention relates to the field of micromachining in special processing technology, in particular to a method for array tubular anode assisted laser electrochemical composite machining based on variable electric field, which is suitable for some microcomponents or array microfabrication with complex continuous structure. Structural processing. Background technique [0002] With the development of micro-electromechanical systems (MEMS), microfabrication technology for the manufacture of tiny and complex parts that can meet the specific functions and needs of MEMS has attracted much attention. Micro-electrodeposition processing technology has the advantages of high manufacturing precision, good process flexibility, and low cost, but its development and application are restricted due to defects such as slow deposition rate, poor deposition localization, and poor deposition quality. Laser electrochemical photoelectric composite deposition technology is...

AI Technical Summary

Problems solved by technology

During the non-electrodeposition period, the device needs to shield the relative movement of the anode film plate and the cathode, and determine the relative displacement in the x and y directions according to the contour shape of the part. The positioning accuracy is extremely high and difficult to guarantee.

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