Large-format array femtosecond laser micro-fluidic chip direct printing method and equipment thereof

Abstract

The invention discloses large-format array femtosecond laser micro-fluidic chip direct printing equipment and method. Large-format laser interference is achieved through large-format array femtosecondlasers with adjustable laser beam states regulated and output, the large-format array femtosecond laser interference states, interference combinations and exposure modes are regulated and controlled,patterns to be machined of a micro-fluidic chip are output through multiple times of exposure superposition, and direct printing machining of the micro-fluidic chip is achieved. According to the invention, rapid processing of the micro-fluidic chip can be realized, the processing efficiency of the micro-fluidic chip is improved, the processing period of the micro-fluidic chip is shortened, and the micro-fluidic chip processing method has remarkable advantages in the aspect of processing the micro-fluidic chip with a complex three-dimensional structure and has a wide application prospect.

Description

technical field [0001] The invention belongs to the technical field of microfluidic chip processing, and in particular relates to a large-format array femtosecond laser microfluidic chip direct printing technology and equipment. Background technique [0002] Microfluidic chip technology conforms to the development trend of miniaturization, integration and intelligence, and integrates the experiments and analysis processes that need to be carried out in traditional laboratories on centimeter-sized chips, so as to realize systems in the fields of biology, chemistry, and medicine. Analyze the detection process. Integrated analysis and detection process and reagent micro-flow requirements The micro-channel structure of the micro-fluidic chip prepared by processing has the characteristics of micro-size, high-precision, complex structure, and true three-dimensional, so strict requirements are put forward for the processing technology of the micro-fluidic chip . Traditional micro...

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Problems solved by technology

This method usually uses a single beam of light for scanning processing of microchannels or micro-functional parts. There are also related studies that use multiple beams of light for parallel processing of micro-functional parts. The method of parallel processing can improve the processing efficiency to a certain extent, but compared with Efficient and intelligent preparation technology for integrated circuit chips such as computers and mobile phones. At present, the efficiency and intelligence of microfluidic chip preparation technology are relatively low, and continuous technological innovation and development are still needed.

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