Nanometer multilayer coating, preparation method thereof and cutter with surface coated with nanometer multilayer coating

A nano-multi-layer and nano-layer technology is applied in coating, metal material coating process, sputtering plating, etc. It can solve the problems that hardness and thermal stability cannot be balanced, and cannot meet the requirements of high-speed cutting performance, etc., to achieve high Hardness, meet the performance requirements, the effect of high hardness

Active Publication Date: 2020-11-20
上海工具厂有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned existing coatings still have the problem that hardness and thermal stability cannot be balanced, and cannot meet the performance requirements of high-speed cutting and dry cutting

Method used

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  • Nanometer multilayer coating, preparation method thereof and cutter with surface coated with nanometer multilayer coating
  • Nanometer multilayer coating, preparation method thereof and cutter with surface coated with nanometer multilayer coating
  • Nanometer multilayer coating, preparation method thereof and cutter with surface coated with nanometer multilayer coating

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preparation example Construction

[0027] The present invention provides the preparation method of nanometer multi-layer coating described in above-mentioned technical scheme, comprises the following steps:

[0028] AlCrTiZrMo high-entropy alloy targets and Cr 2 o 3 target, on the surface of the substrate alternate cycle magnetron sputtering deposits (AlCrTiZrMo) N nanolayers and Cr 2 o 3 nano layer, resulting in a nano multilayer coating.

[0029]In the present invention, the substrate is preferably pretreated before use, and the pretreatment preferably includes sequential polishing, organic solvent washing, water washing, drying and vacuum ion cleaning. In the present invention, there is no special limitation on the polishing method, and a polishing method known to those skilled in the art can be used, such as mirror polishing. In the present invention, the organic solvent washing preferably includes washing with absolute ethanol and washing with acetone in sequence. In the present invention, there is no ...

Embodiment 1

[0043] (1) Carry out mirror polishing treatment on the single crystal silicon substrate, then use absolute ethanol, acetone and deionized water in sequence to clean ultrasonically for 20 min under the condition of 30 kHz, then dry, place in a vacuum cleaning chamber, and evacuate to 6× 10 -4 After Pa, Ar was introduced as an ion source, and the vacuum degree was maintained at 4 Pa. The high-speed steel substrate washed with deionized water was bombarded with intermediate frequency ions for 30 minutes by a radio frequency power supply under the condition of 80W, and a pretreated single crystal silicon wafer substrate was obtained.

[0044] (2) Place the pretreated single crystal silicon wafer substrate in a magnetron sputtering system, and alternately use AlCrTiZrMo high-entropy alloy targets with a purity of 99.99% and a diameter of 75mm and Cr in nitrogen and an inert gas 2 o 3 Target, AlCrTiZrMo N nano-layers and Cr 2 o 3 Nano layer:

[0045] The working conditions of ma...

Embodiment 2～5

[0049] Prepare nanometer multilayer coating according to the method for embodiment 1, the preparation conditions of embodiment 1~5 are as shown in table 1:

[0050] The preparation condition of table 1 embodiment 1~5

[0051]

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Abstract

The invention provides a nanometer multilayer coating, a preparation method of the nanometer multilayer coating and a cutter with the surface coated with the nanometer multilayer coating, and belongsto the technical field of protective coatings. The nanometer multilayer coating provided by the invention comprises (AlCrTiZrMo)N nanometer layers and Cr2O3 nanometer layers which are sequentially andalternately laminated on the surface of a substrate. According to the nanometer multilayer coating provided by the invention, a coherent boundary is formed between the (AlCrTiZrMo)N nanometer layersand the Cr2O3 nanometer layers, then dislocation movement is hindered, and the hardness of the nanometer multilayer coating is high; and due to the fact that modulation layers are the Cr2O3 nanometerlayers with low oxygen diffusion coefficient, the thermal stability of the nanometer multilayer coating is better than that of the (AlCrTiZrMo)N single-layer coating. The nanometer multilayer coatingprovided by the invention has both high hardness and high thermal stability, the defects in the use of a traditional tool coating can be made up, the research range of the tool coating is widened, andthe performance requirements of high-speed cutting and dry cutting are satisfied.

Description

technical field [0001] The invention relates to the technical field of protective coatings, in particular to a nanometer multilayer coating, a preparation method thereof, and a tool whose surface is coated with the nanometer multilayer coating. Background technique [0002] With the rapid development of the manufacturing industry, higher and higher requirements are put forward for the surface properties of materials, which not only require high hardness, wear resistance and corrosion resistance, but also require performance under some harsh service conditions such as high temperature. good. Coating a layer of protective hard coating on the surface of the material is an economical and practical way to improve the surface performance of the material. As an important branch of the surface coating field, the protective coating is widely used in machinery manufacturing, automobile industry, geological drilling It is widely used in fields such as mold industry and mold industry, ...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/08
CPCC23C14/352C23C14/0036C23C14/0641C23C14/083
Inventor 孟漪陆红妹何佳王诗凯李伟陈立强
Owner 上海工具厂有限公司
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