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Thermal control phase modulator based on sub-wavelength grating metasurface

A technology of phase modulator and sub-wavelength grating, which is applied in the direction of instruments, light guides, optics, etc., can solve the problems of low Q value, insufficient phase mutation, and insufficient sharpness of resonance peak, etc., achieve high Q value, and realize thermal control phase modulation , The effect of high-sensitivity thermal control phase modulation

Pending Publication Date: 2020-11-06
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, at present, the Q value of sensors based on GMR and MAGMR is still relatively low, and the resonance peak is not sharp enough, which leads to their phase mutation is not sharp enough, which is not conducive to the application of high-sensitivity phase modulators.

Method used

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  • Thermal control phase modulator based on sub-wavelength grating metasurface
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  • Thermal control phase modulator based on sub-wavelength grating metasurface

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Embodiment 1

[0025] As shown in Figure 1, the present invention discloses a thermally controlled phase modulator based on a subwavelength grating metasurface, including a six-layer structure of the subwavelength grating metasurface chip, the first layer being the bottom transparent medium substrate 1, The second layer is a metal thin film layer 2, the third layer is a dielectric thin film layer 3, the fourth layer is a dielectric grating layer 4, the fifth layer is a high refractive index dielectric grating layer 5, and the sixth layer is a thermo-optic dielectric layer 6, wherein the heating The electrode array 7 is set between the first layer and the second layer (it can also be set on the sixth layer); by adjusting the parameters of the subwavelength grating metasurface structure, based on the original GMR (Guided-Mode Resonance) resonance peak On the surface, a high-Q resonance peak is derived; the high-Q peak is accompanied by a sharp phase mutation, and the phase mutation curve will d...

Embodiment 2

[0027] A thermally controlled phase modulator based on a subwavelength grating metasurface, the material and structural parameters can be selected as follows: the grating period p of the dielectric grating layer 4 and the high refractive index dielectric grating layer 5 are set to 430nm; the grating duty cycle q =0.5; Transparent dielectric substrate 1 chooses SiO 2 ; The metal film layer 2 selects Ag, and the thickness is 150nm; the dielectric film layer 3 selects Si 3 N 4 , the thickness is 160nm; the dielectric grating layer 4 chooses Si 3 N 4 , the thickness t1 is 40nm; the high refractive index dielectric grating layer 5 chooses TiO 2 , the thickness t2 is 280nm, satisfying t14 RIU / °C, when the temperature changes by ±2.8°C, that is, ΔT=±2.8°C, the refractive index of PDMS changes by about 0.001 RIU, that is, Δn=±0.001, so that the change in the refractive index will cause the drift of the phase modulation curve, such as attached image 3 shown. attached image 3 ...

Embodiment 3

[0029] A thermally controlled phase modulator based on a sub-wavelength grating metasurface can adjust the working wavelength accordingly when the grating parameters are changed, and is suitable for phase modulation ranging from visible light to near-infrared bands. attached Figure 4 Shown is the variation curve of the operating wavelength of the thermally controlled phase modulator with the grating parameters. It can be seen that the thermally controlled phase modulator of the subwavelength grating metasurface can work in the visible light band (such as when the grating period p=430nm, the working wavelength is around 608nm) by adjusting the grating parameters, and can also extend the working wavelength to Near-infrared band (for example, when the grating period p=600nm, the working wavelength is around 850nm).

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Abstract

The invention relates to a thermal control phase modulator based on a sub-wavelength grating metasurface. The thermal control phase modulator comprises a transparent medium substrate of a first bottomlayer, a second metal film layer, a third medium film layer, a fourth medium grating layer, a fifth high-refractive-index medium grating layer and a sixth thermo-optical medium layer. The medium grating layer and the high-refractive-index medium grating layer are periodic grating arrays, the grating periods are p, the grating duty ratios are q, the thicknesses are t1 and t2 respectively, and t1 <t2. The thermal control phase modulator based on the sub-wavelength grating metasurface structure has a high Q value formant, the high Q value formant is accompanied by violent phase mutation, and aphase mutation curve drifts along with the change of the external refractive index. High-sensitivity thermal control phase modulation can be realized based on the spatial light modulator, so that thefunction of the spatial light modulator is realized, and the thermal control phase modulator can be applied to the fields of optical communication, display and imaging, optical signal processing, automatic driving, microwave signal processing and the like.

Description

technical field [0001] The invention belongs to the field of optical phase modulation, and relates to a thermally controlled phase modulator based on a subwavelength grating metasurface, which can be applied to the fields of optical communication, display and imaging, optical signal processing, automatic driving, microwave signal processing and the like. Background technique [0002] GMR (Guided-Mode Resonance, guided-mode resonance) refers to the coupling between the external field and the leakage mode of the sub-wavelength grating waveguide, and resonance occurs. The diffraction grating can be equivalent to a periodically modulated planar waveguide. When an external propagating wave and the guided wave mode supported by the sub-wavelength grating waveguide meet the wave vector matching, strong coupling will occur, and the coupled energy will be reflected or transmitted by the periodic grating. Going out, a sharp reflection or transmission resonance peak is formed. At the r...

Claims

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Application Information

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IPC IPC(8): G02F1/01G02F1/00G02B6/124
CPCG02F1/0147G02F1/0102G02F1/009G02B6/124
Inventor 何赛灵刘振超郭庭彪谭沁董红光
Owner ZHEJIANG UNIV
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