A plane NMR micro-coils micro detector
A technology of nuclear magnetic resonance and micro-detector, which is applied in the direction of magnetic resonance measurement, analysis by nuclear magnetic resonance, and measurement of magnetic variables, etc., can solve the problems of reduced detection sensitivity, long distance from the coil, high substrate brittleness, etc., and achieve improved detection Effects of sensitivity, low series resistance, and high Q value
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[0017] Fig. 1 is a specific embodiment of the present invention. The present invention consists of a planar nuclear magnetic resonance microcoil 1 and a microchannel structure 2, and adopts an integrated design, that is, the planar nuclear magnetic resonance microcoil 1 and the microchannel structure 2 are jointly processed on the same piece On the polyimide substrate 3, wherein: the planar nuclear magnetic resonance microcoil 1 is processed on the surface of the polyimide substrate 3, and the microchannel structure 2 is a cuboid structure, which is processed on the other side of the polyimide substrate 3, A polyimide thin sheet 4 is embedded inside the polyimide substrate 3 directly below the planar nuclear magnetic resonance microcoil 1 .
[0018] The key structures of the present invention are the planar nuclear magnetic resonance microcoil 1 and the microchannel structure 2 . The processing of the planar microcoil nuclear magnetic resonance micro detection device is divide...
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