Large-numerical-aperture laser lens imaging inspection system

Abstract

The invention discloses a large-numerical-aperture laser lens imaging inspection system. A single-mode monochromatic light source and an optical fiber collimating mirror form a parallel light system,a to-be-measured laser lens is slidably installed between the optical fiber collimating mirror and a standard objective lens along the optical axis and is used for focusing incident parallel light beams into a focus light spot, and the position of the focus light spot coincides with the focus of the standard objective lens. The standard objective lens and a standard tube lens form a conjugate imaging system, and the conjugate imaging system is used for amplifying the focus light spot into a focused light beam image and projecting the focused light beam image to an area array CCD element, the position of the area array CCD element coincides with the focus of the standard tube lens, the amplification factor of the conjugate imaging system is 10X-100X, and the numerical aperture NA of the to-be-measured laser lens is smaller than or equal to the numerical aperture NA of the standard objective lens. The system has the advantages of being flexible in operation, high in visibility and easy in judgment and standardization, the quality and efficiency of laser optical lens design and optical inspection are improved, and higher production efficiency and more normative inspection quality control are achieved for laser lens production.

Description

technical field [0001] The invention belongs to the technical field of optical inspection, in particular to an imaging inspection system of a laser lens with a large numerical aperture. Background technique [0002] In modern industrial production, the use of laser as a processing method for cutting, welding and marking of various materials has been very extensive. As the ablation width and material loss are required to be reduced in the laser cutting process, it is necessary to use a laser lens with a larger numerical aperture and a smaller focus spot to improve processing efficiency and reduce material waste. The laser lens with larger numerical aperture and smaller focus spot requires higher production and assembly precision. [0003] The inspection of high-precision lenses generally adopts the star point method, that is, by observing the shape and light intensity distribution of a diffraction image (commonly called a star point image) formed by a point light source pass...

AI Technical Summary

Problems solved by technology

[0004] The present invention aims at the problems of uncertain small hole size, irregular shape, uncertain quantity, and chromatic aberration interference in the inspection of the existing star point plate, and proposes a large numerical aperture with stable light source wavelength, high beam quality, good interference, and high brightness Laser lens imaging inspection system to improve the quality and efficiency of laser optical lens design and optical inspection

Images