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Nanoimprint template, manufacturing method and demolding method thereof

A technology of nano-imprinting and manufacturing method, applied in the field of nano-imprinting, can solve the problems of separation of imprinting glue and imprinting substrate, etc.

Active Publication Date: 2020-08-21
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the above-mentioned method cannot effectively solve the risk of separation of the imprinting glue and the imprinting substrate during the demoulding process. During the molding process, there is still a risk of separation of the imprint adhesive from the imprint substrate

Method used

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  • Nanoimprint template, manufacturing method and demolding method thereof
  • Nanoimprint template, manufacturing method and demolding method thereof
  • Nanoimprint template, manufacturing method and demolding method thereof

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Embodiment Construction

[0043] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. Embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatuses and methods consistent with aspects of the present application as recited in the appended claims.

[0044] The terminology used in this application is for the purpose of describing particular embodiments only, and is not intended to limit the application. As used in this application and the appended claims, the singular forms "a", "the", and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.

[0045]It should be understood that "first", "...

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Abstract

The invention discloses a nanoimprint template and a manufacturing method and demolding method thereof. The nanoimprint template includes a first template and a second template. The first template isprovided with an impressing pattern, and the impressing pattern comprises a plurality of impressing columns arranged at intervals and grooves located between the adjacent impressing columns. Wherein second template is provided with a filling pattern, the groove of the first template is filled with the filling pattern, so that the first template and the second template are embedded, and the impressing column penetrates through the second template. The nanoimprint template can reduce the risk that imprint adhesive is separated from the imprint substrate.

Description

technical field [0001] The present application relates to nano-imprint technology, and in particular to a nano-imprint template, a manufacturing method and a demoulding method thereof. Background technique [0002] Nanoimprint technology has the advantages of high resolution, simple process, ultra-low cost, and high productivity, and is widely used in micro-nano manufacturing fields such as LEDs and semiconductors. Nanoimprinting, which completes the mold forming process by simple UV exposure, is considered one of the most promising next-generation photolithography technologies. However, there is a risk of separation (Peeling) of the imprinting glue (resist) and the imprinting substrate (substrate) during the demoulding process. [0003] At present, one way to suppress the detachment of the embossing adhesive from the embossing substrate is to increase the bonding force between the embossing adhesive and the embossing substrate, for example, coating a primer layer on the em...

Claims

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Application Information

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IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 周雪原张笑赵晋路彦辉李多辉宋梦亚
Owner BOE TECH GRP CO LTD
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