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Method for determining helium concentration depth distribution in metal material by using radio frequency glow discharge spectrometer

A radio frequency glow discharge, metal material technology, applied in material excitation analysis, electrical excitation analysis and other directions, to achieve the effect of simple operation, accurate draft, and large detection depth

Pending Publication Date: 2020-08-21
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of analyzing and measuring the helium concentration distribution in metal materials in the prior art, and to provide a method for detecting the depth distribution of helium concentration in metal materials using a radio frequency glow discharge spectrometer. Quantification and sensitivity of detecting the concentration and depth distribution of helium gas elements in metal materials

Method used

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  • Method for determining helium concentration depth distribution in metal material by using radio frequency glow discharge spectrometer
  • Method for determining helium concentration depth distribution in metal material by using radio frequency glow discharge spectrometer
  • Method for determining helium concentration depth distribution in metal material by using radio frequency glow discharge spectrometer

Examples

Experimental program
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Effect test

Embodiment 1

[0020] (1) Standard sample: high-energy helium ions are implanted into tungsten (purity 99.99%) metal through an ion implanter (NEC 400kV) to obtain a standard sample. The energy of implanting helium ions was 400 keV, and the ion beam density was 1.5×10 13 cm -2 the s -1 , with an injection dose of 2.6×10 17 He / cm 2 ;

[0021] (2) Radio frequency glow discharge spectroscopy detection: use a radio frequency glow discharge spectrometer (the model GD PROFILER 2 produced by Horiba Jobin Yvon, France) to test the concentration distribution of helium in the depth direction on the standard sample after helium injection, and get Electrical signal-time curve of helium element. The specific working conditions are: the excitation method is RF, the anode size is 4mm, the vacuum chamber pressure is 500Pa, the frequency is 3000Hz, the power is 15W, the module value is 6.8V, and the phase value is 6.0V. figure 1 Obtain the electrical signal-time curve of helium in the depth direction ...

Embodiment 2

[0026] (1) Standard sample: high-energy helium ions are implanted into copper (purity 99.99%) metal material through an ion implanter (NEC 400kV) to obtain a helium-copper sample. The energy of implanting helium ions was 400 keV, and the ion beam density was 1.5×10 13 cm -2 the s -1 , with an injection dose of 2.6×10 17 He / cm 2 ;

[0027] (2) Radio frequency glow discharge spectrum detection: the specific working conditions are the same as in Example 1;

[0028] (3) Obtain the sputtering rate of the standard sample by non-contact optical profilometry: the specific calibration process is the same as that in Example 1;

[0029] (4) Electrical signal-time curve is converted into electrical signal-depth curve: the specific calculation process is the same as that in Example 1;

[0030] (5) The distribution curve of the helium element concentration in the copper sample in the depth direction: the distribution curve of the helium element concentration in the copper sample in t...

Embodiment 3

[0032] (1) Standard sample: implant high-energy helium ions into EUROFER steel material through an ion implanter (NEC 400kV) to obtain a helium-containing EUROFER steel sample. The energy of implanting helium ions was 400 keV, and the ion beam density was 1.5×10 13 cm -2 the s -1 , with an injection dose of 2.6×10 17 He / cm 2 ;

[0033] (2) Radio frequency glow discharge spectrum detection: the specific working conditions are the same as in Example 1;

[0034] (3) Obtain the sputtering rate of the standard sample by non-contact optical profilometry: the specific calibration process is the same as that in Example 1;

[0035] (4) Electrical signal-time curve is converted into electrical signal-depth curve: the specific calculation process is the same as that in Example 1;

[0036] (5) The distribution curve of the helium element concentration in the copper in the depth direction: use the sputtering rate obtained above and the determined helium element electrical signal-con...

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Abstract

The invention provides a method for measuring helium concentration distribution in a metal material by a radio frequency glow discharge spectrometer. The method includes: preparing a helium-containingtungsten material as a standard sample through high-energy helium ion implantation, conducting SRIM software simulation calculation to obtain concentration distribution information of helium in the tungsten material, setting the working conditions of a radio frequency glow discharge spectrometer, carrying out glow discharge spectrum detection in the depth direction on the standard sample, and calibrating the relation between the etching depth and the test duration of the standard sample by a non-contact optical profilometer; combining an SRIM simulation result and the etching depth-time relationship, converting an electric signal curve of the detected helium into helium concentration depth distribution information; and finally, detecting the copper and EUROFER steel samples irradiated byhelium plasmas by using a radio frequency glow discharge spectrometry so as to verify the feasibility and accuracy of the method. The method can provide a rapid, quantitative and reliable detection and analysis method for retention of helium in a plasma-oriented material for a magnetic confinement nuclear fusion Tokamak device.

Description

technical field [0001] The invention relates to a method for detecting helium in metal materials, in particular to a method for detecting helium concentration distribution in metal materials by using a radio frequency glow discharge spectrometer. Background technique [0002] Helium is one of the main products of the deuterium-tritium reaction. In the tokamak nuclear fusion device, there will be a large number of helium ions and helium ash trapped in the first wall material, which weakens the mechanical properties of the material and affects the service life and safety of the device. Therefore, it is very important for the safe operation of the tokamak device to study the retention behavior of helium in the first wall material and obtain the concentration and depth distribution information of helium in the first wall material. In addition, the detection of the depth distribution of helium in the first wall material is of great significance to the study of the interaction bet...

Claims

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Application Information

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IPC IPC(8): G01N21/67
CPCG01N21/67
Inventor 王鹏贺冉张弘乔丽
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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