Carbon film deposition device

A deposition device and carbon film technology, applied in the field of metal surface treatment, to achieve the effects of good wear resistance, high film hardness and small internal stress

Active Publication Date: 2020-07-03
珠海凯赛奥表面技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention aims to solve the problems described above

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Embodiment Construction

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention , but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.

[0029] Such as figure 1 As shown, a carbon film deposition device includes: a vacuum chamber 101, a vacuum device 118 arranged on the top of the vacuum chamber 101 for providing a vacuum for the vacuum c...

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Abstract

The invention provides a carbon film deposition device. The carbon film deposition device comprises a vacuum cavity, a vacuumizing device arranged at the top of the vacuum cavity, and a magnetic filter device arranged on one side of the vacuum cavity, and the side, opposite to the magnetic filter device, of the vacuum cavity is provided with an air inlet; the magnetic filter device comprises a magnetic filter bent pipe, a magnetic filter straight pipe communicating with the magnetic filter bent pipe, a focusing magnetic field arranged on the outer side of the magnetic filter bent pipe, and a high-frequency magnetic field arranged on the outer side of the magnetic filter straight pipe; the magnetic filter bent pipe and the magnetic filter straight pipe are coupled at a first predetermined angle; the magnetic filter straight pipe is connected with a first anode cylinder, and a first cathode sleeve sleeves the first anode cylinder; the magnetic filter bent pipe is connected with a secondanode cylinder, and a second cathode sleeve sleeves the second anode cylinder; and a second cathode material in the second cathode sleeve is carbon. The magnetic filter straight pipe and the magneticfilter bent pipe of the carbon film deposition device are coupled, inner stress of a deposited carbon film is small, almost no carbon particle exists, and the film layer hardness is high.

Description

technical field [0001] The invention belongs to the technical field of metal surface treatment, in particular to a deposition device for depositing a carbon film on a PCB cutter. Background technique [0002] In recent years, the rapid development of the PCB industry has not only led to a rapid increase in the output of cemented carbide micro-tools, but also put forward higher requirements for the performance of micro-tools for PCB processing, especially the requirements for service life. The PCB board is composed of multi-layer copper foil wiring, glass fiber and epoxy resin. During the high-speed processing of the PCB board, the high-hardness glass fiber will cause rapid wear of the carbide micro-tools, and the resin at high temperature will also Strong chemical corrosion is formed on the binder phase Co in cemented carbide. Therefore, the lifespan of micro tools made of cemented carbide materials is very short when processing PCB boards, and in order to meet the precisio...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32C23C14/14
CPCC23C14/0605C23C14/325C23C14/0635C23C14/0021C23C14/14
Inventor 程文雅
Owner 珠海凯赛奥表面技术有限公司
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