Method for preparing lithium phosphate film through atomic layer deposition

Abstract

The invention discloses a method for preparing a lithium phosphate film through atomic layer deposition. The method is characterized in that the atomic layer deposition technology is adopted; carriergas flow rushes tert-butyllithium pulses into a vacuum reaction chamber to have chemical self-saturation adsorption with a base material to be plated and have an exchange reaction to generate a lithium displacement precursor on the surface of the base material to be plated; and the lithium displacement precursor has a reduction reaction with trimethyl phosphate to generate the single lithium phosphate film. As the precursor has self-saturability in chemical adsorption, deposition of one single lithium phosphate film is completed within one process cycle. Each time the process cycle is repeated, one lithium phosphate film monolayer is laminated on the previous single lithium phosphate film. By controlling the number of process cycles, the thickness of the lithium phosphate film is controlled accurately. The step coverage rate of the lithium phosphate film is good. The good covering effect can be formed on a sample of a complex space structure, and a plating layer is smooth and high in uniformity and stability. The defects in the prior art are overcome.

Description

technical field [0001] The invention relates to the technical field of atomic layer deposition, in particular to a method for preparing a lithium phosphate thin film by atomic layer deposition. Background technique [0002] As people continue to pay attention to environmental issues and the energy crisis is becoming more and more serious, the way humans obtain electricity from burning fossil fuels is gradually being replaced, and new clean energy that can replace traditional fossil fuels is attracting more and more attention. The technology of converting new clean energy such as wind energy and solar energy into electrical energy has made great progress. However, the system for storing these electrical energy still needs to be further developed. At present, energy storage systems such as lithium-ion batteries have become a hot research field, among which lithium-ion secondary batteries have attracted much attention from the scientific community because of their high voltage,...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing lithium phosphate thin films by atomic layer deposition, which reasonably solves the problem of poor film step coverage in the preparation method of lithium phosphate thin films in the prior art, and cannot effectively treat substrates to be plated with complex spatial structures. The problem that the material forms a good coating effect