A device for cleaning the surface of optical components by ion wind and electrostatic coupling

A technology of optical components and electrostatic coupling, applied in the direction of external electrostatic separators, cleaning methods and appliances, chemical instruments and methods, etc., can solve the problems of space pollution particles, etc., and achieve high safety, strong cleaning power, convenient collection and cleaning effect

Active Publication Date: 2021-08-31
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of space pollution particles above the optical element, and to provide a device for cleaning the surface of the optical element through ion wind and electrostatic coupling. The research object is to carry out the feasibility experiment of the device based on electrostatic adsorption and air knife purge, and develop the corresponding electrostatic adsorption device for particle pollutants, so as to realize the adsorption and collection of suspended particles in the mirror, and achieve the purpose of efficient removal of particle pollutants

Method used

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  • A device for cleaning the surface of optical components by ion wind and electrostatic coupling
  • A device for cleaning the surface of optical components by ion wind and electrostatic coupling
  • A device for cleaning the surface of optical components by ion wind and electrostatic coupling

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specific Embodiment approach 1

[0019] Specific implementation mode 1: This implementation mode records a device for cleaning the surface of optical components by ion wind and electrostatic coupling, such as figure 1 As shown, the device includes a fixed bracket 1, an optical element 2 (a smooth mirror or other optical elements), an ion wind system 3, an electrostatic adsorption system 4 and a particle pollutant storage box 5;

[0020] Described fixed support 1 is a triangular prism placed horizontally, and the slope on fixed support 1 front side is working surface 1-1, and the included angle of described working surface 1-1 and horizontal plane is 45 °, on working surface 1-1 ( The base plate is fixed by bolts), and the ion wind system 3, the electrostatic adsorption system 4 and the particle pollutant storage box 5 are fixed on the base plate from top to bottom (by bolts);

[0021] Such as figure 2 As shown, the ion wind system 3 includes an air knife 6, an ion rod support 7, a three-degree-of-freedom co...

specific Embodiment approach 2

[0025] Specific embodiment two: a kind of ion wind and electrostatic coupling described in specific embodiment one realize the device that optical element surface cleans, and the width of described air knife 6 and ion bar 9 is 610mm, and the diameter of described ion bar 9 The length and height of the ion wind system 3 are 132mm and 145mm respectively, the length is along the direction perpendicular to the working surface and the width, and the height is the direction perpendicular to the working surface 1-1.

specific Embodiment approach 3

[0026] Specific embodiment three: a kind of ion wind and electrostatic coupling described in specific embodiment one realizes the device that optical element surface cleans, and described ion bar support 7 and air knife 6 are connected by bolt, and ion bar support 7 has elastic force, when After the ion rod 9 is stuck into the ion rod bracket 7, it will generate elastic force due to deformation, so as to ensure that it will not slip. The air knife 6 is fixed on the three-degree-of-freedom combined translation platform through the four bolt holes provided on the connecting piece 10. 8, there are three M6 countersunk bolts on the connecting piece 10 to ensure the fixing of the connecting piece 10 and the three-degree-of-freedom combined translation stage 8.

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Abstract

The invention relates to a device for cleaning the surface of an optical element by ion wind and electrostatic coupling, which belongs to the field of clean technology. The purpose is to solve how to clean the surface of optical components in an environment that cannot be reached manually, including fixed brackets, optical components, ion wind system, electrostatic adsorption system and particle pollutant storage box; the ion wind system consists of air knife, Composed of ion rods, ion rod brackets, fixed brackets, connecting pieces, and three-degree-of-freedom combined translation stages, the electrostatic adsorption system consists of rod-shaped electrodes, electrode fixing supports, manual translation tables, and fixed brackets. The box support frame is connected with the working surface. The included angle between the particle pollutant storage box and the storage box support frame is 135°. The structure of the present invention is very compact, the optical element is fixed on the bottom plate through the fixed bracket, the mass production is high, the cost is low, the ion wind blowing is adopted, the high-voltage adsorption effect is good, and it has the characteristics of leakage protection performance and high safety factor.

Description

technical field [0001] The invention belongs to the technical field of surface cleaning of large-diameter optical elements, and in particular relates to a device for realizing surface cleaning of optical elements through ion wind and electrostatic coupling. Background technique [0002] There are a large number of large-diameter optical components such as lenses, windows, reflectors, and transmission mirrors in high-energy laser systems. The cleanliness of optical components plays a vital role in the stable operation of the system, and the failure mode of optical components is mainly caused by laser damage. The stable and continuous operation of the device is of great significance. [0003] In high-energy laser facilities, various pollutants adhering to the surface of optical components are also closely related to surface damage. Under the action of high-energy laser, particle pollutants are plasmaized, and high-temperature and high-speed plasma causes burn damage to optica...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B5/02B08B13/00B03C3/04
CPCB08B5/02B08B13/00B03C3/04B08B6/00G02B27/0006B03C3/41B03C3/49B03C2201/14B03C3/017B03C3/06B03C3/86G02B7/182
Inventor 白清顺窦昱昊张祎晨谢成浩牛龙飞苗心向
Owner HARBIN INST OF TECH
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