Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A method of nanometer precision preparation using femtosecond laser

A femtosecond laser and nanotechnology, applied in laser welding equipment, welding equipment, manufacturing tools, etc., can solve problems such as limited process flow, yield and cost, limited focusing spot diffraction limit, and difficulty in meeting industrial mass production. , to achieve the effect of good processing compatibility, strong robustness, and improved accuracy

Active Publication Date: 2021-04-20
JILIN UNIV
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The heavy dependence of these technologies on vacuum conditions limits their process flow, yield and cost, so it is difficult to meet the needs of industrial mass production
As an emerging optical processing technology, femtosecond laser has the ability to perform low-cost and fast micro-processing on the surface of almost all materials in the atmospheric environment. However, limited by the diffraction limit of the focused spot, its processing accuracy is mostly between microns to several Between hundreds of nanometers, it is difficult to meet the precision required by most nanotechnology
Up to now, how to improve the resolution of femtosecond laser surface material removal is still an open problem

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A method of nanometer precision preparation using femtosecond laser
  • A method of nanometer precision preparation using femtosecond laser
  • A method of nanometer precision preparation using femtosecond laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Nano-patterns with birefringence are prepared on titanium dioxide by using femtosecond laser for nano-precision preparation.

[0039] The initial damaged nanopore formed by femtosecond laser multiphoton excitation is used as a seed structure, and the energy and polarization state of subsequent laser pulses are adjusted in real time, so that uniform and directional optical near-field enhancement near the seed structure is used to achieve high-precision removal of processed materials. According to the geometric structure of the pre-designed nano-groove, the polarization state of the laser pulse is adjusted in real time, so that the nano-groove designed by the sum of the polarization of the laser pulse remains locally vertical, thereby preparing any given geometric pattern of the nano-groove.

[0040] The method of preparing a nanometer pattern with birefringence on titanium dioxide by using a femtosecond laser to prepare nanometer precision, the specific steps are as follo...

Embodiment 2

[0055] A method for preparing periodic nano-grooves on the surface of titanium dioxide and quartz glass by using femtosecond laser for nano-precision preparation.

[0056] Large-area nanostructures of any given shape can be rapidly prepared by periodically depositing seed structures and adjusting the energy and polarization state of laser pulses in real time.

[0057] Fabrication of Periodic Nanogroove Arrays on TiO2 and Quartz Glass Surfaces:

[0058] (1) Leveling of samples;

[0059] Same as in Example 1, wherein the spot of the femtosecond laser is enlarged by 2 times after beam expansion.

[0060] (2), preparation of seed structure;

[0061] As in Example 1, it is enough to periodically prepare the seed structure on the surface of the sample.

[0062] (3) Raster scanning to prepare large-area nanostructures:

[0063]When machining on titanium dioxide surfaces, reduce the energy of the laser pulse to between 83% of the material damage threshold (for quartz glass, reduce...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
wavelengthaaaaaaaaaa
Login to View More

Abstract

The invention discloses a method for preparing nanometer precision by using femtosecond laser, and belongs to the technical field of laser processing. The invention uses the initial damage nanopore formed by multiphoton excitation of femtosecond laser as a seed structure, and adjusts the energy and energy of subsequent laser pulses in real time. The polarization state enables uniform and directional optical near-field enhancement near the seed structure, and finally achieves high-precision removal of processed materials. Benefiting from the high spatial localization of the near-field spot energy, we used femtosecond laser pulses with a wavelength of 800 nm to achieve the processing accuracy of the thinnest line width of 18 nm, with a resolution of 1 / 40 of the wavelength. The method for preparing nanometer precision by using femtosecond laser of the present invention does not need a vacuum environment, and has good atmosphere / solution processing compatibility. In addition, rapid printing of large-area periodic micro-nano structures can be performed by combining parallel deposition of seed structures and raster scanning, which can effectively reduce the manufacturing cost of the device and is more suitable for industrial production.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to the use of femtosecond laser multiphoton excitation to generate initial damaged nanoholes on the surface of materials as seed structures, so as to guide the directional localized near-field generated by subsequent laser pulses near the seed structures Enhanced to remove materials to achieve high-precision laser nanoprocessing in an atmospheric environment. [0002] technical background [0003] The development of modern nanotechnology and quantum technology must rely on high-precision micro-nano processing technology for device preparation. The new generation of micro-nano manufacturing methods that are still under development, such as electron beam lithography (EBL) and focused ion beam (FIB), can provide high processing resolution, but they all require a very high degree of vacuum to work. Ensure the effective propagation and convergence of high-energy parti...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/0622B23K26/064B23K26/082B23K26/70
CPCB23K26/0624B23K26/0648B23K26/064B23K26/082B23K26/702G02B27/286G02B27/283B23K26/355G02B5/30B23K26/364B23K2103/14B23K2103/54B23K26/0006B23K26/032B23K26/0643B23K26/0652B23K26/0853G02B2006/12116H01S3/10061
Inventor 孙洪波李臻赜陈岐岱
Owner JILIN UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com