Laser processing morphological performance time-resolved differential confocal spectrum measurement method and device

Abstract

The invention discloses a laser processing morphological performance time-resolved differential confocal spectrum measurement method and device, and belongs to the field of laser processing detection.A continuous laser differential confocal light path is used for axially and accurately positioning the surface of a material, femtosecond laser is used for processing the material, femtosecond pulselaser with different delay time is used for detecting Raman spectrum performance parameters of the material, and meanwhile, the differential confocal light path is used for detecting morphological parameters of the material. The processes of continuous laser differential confocal positioning, femtosecond laser processing, delayed femtosecond laser Raman spectrum performance parameter detection andsynchronous differential confocal morphological parameter detection are repeated, the change process of the morphological parameters and the performance parameters of the material along with time infemtosecond laser processing can be obtained at the same time, time resolution measurement of the morphological parameters and the performance parameters of the material in femtosecond laser processing is achieved, and controllability of femtosecond laser processing precision of a microstructure and sample processing quality are improved.

Description

technical field [0001] The invention relates to a time-resolved differential confocal spectrum measurement method and device for laser processing morphology performance and belongs to the field of laser processing detection. Background technique [0002] Femtosecond laser processing technology uses the tightly focused "focus" of laser pulses to interact nonlinearly with materials to induce photophysical and photochemical changes, and realizes the processing and manufacturing of micro-nano device structures, because of its high processing precision and material adaptability Wide and other significant advantages have attracted much attention. [0003] In the femtosecond laser processing and manufacturing process of materials, it generally includes the removal and modification of materials, that is, the "shaping" and "formation" of materials. In some cutting-edge manufacturing fields, both are often combined, that is, in Both the morphological parameters and performance parame...

AI Technical Summary

Problems solved by technology

[0004] In terms of morphological parameter measurement, due to the extremely short processing time of femtosecond laser material removal, most of the existing measurement methods are still based on traditional measurement techniques, such as axial monitoring based on laser triangular displacement sensors, back coherence tomography monitoring, Optical coherence tomography monitoring and other methods have a resolution at the submicron level; confocal-based measurement technology has extremely high application potential in femtosecond laser processing, and confocal or differential confocal axial monitoring methods have nanometer-level axial resolution, and has high focus accuracy and measurement stability. For example, patent CN108286936A discloses an integrated method and device for laser micro-nano processing differential confocal online monitoring, which solves the problem of femtosecond laser processing. Drift problem, high-precision real-time fixed focus problem, and online detection problem of femtosecond laser processing samples, but the measurement object of this invention is still the sample shape on the macro time scale, and it is impossible to monitor the shape change process at the moment of material removal

[0005] In terms of performance parameter measurement, due to the extremely short process of femtosecond laser modification and processing of materials, current measurement methods cannot obtain instantaneous material property change information. For example, a femtosecond laser processing parameter confocal Raman disclosed in patent CN109270047A Spectral in-situ monitoring method and device, incorporating laser confocal Raman spectroscopy detection technology into the femtosecond laser processing system, to achieve integrated in-situ monitoring of morphological and performance parameters in femtosecond laser processing

However, this patent is still aimed at the measurement of the morphological parameters and performance parameters of the sample on the macroscopic time scale, and cannot realize the simultaneous time-resolved measurement of the material morphological parameters and performance parameters at the moment of femtosecond processing

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