Electrical failure pattern discrimination device and discrimination method

A technology for electrical failure and identification devices, which is applied in the direction of circuit, electrical components, semiconductor/solid-state device testing/measurement, etc., can solve the problem of high loss and achieve the effect of improving accuracy

Active Publication Date: 2022-03-11
CHANGXIN MEMORY TECH INC
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Losses due to device defects are extremely costly

Method used

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  • Electrical failure pattern discrimination device and discrimination method
  • Electrical failure pattern discrimination device and discrimination method
  • Electrical failure pattern discrimination device and discrimination method

Examples

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Embodiment Construction

[0045] When using electrical failure patterns to analyze the yield rate of chip products such as DRAM chips, the current process of analyzing electrical failure patterns is to select electrical failure patterns randomly or based on stored information (such as storage time, file name, etc.) for pattern feature discrimination And classified to obtain the number of failed chips under different failure categories and perform yield analysis.

[0046] The inventors found that, when discriminating and categorizing the graphic features of multiple electrical failure graphics, if the graphic features of the electrical failure graphics identified later in the sequence include a discriminated and classified electrical failure graphic feature, the electrical failure pattern judged later in the order will be preferentially classified into the same category as the identified and classified electrical failure pattern, but although the pattern features of the electrical failure pattern judged ...

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Abstract

The present invention relates to the field of integrated circuits, and provides a device and a method for discriminating electrical failure patterns, which are used to discriminate and classify multiple electrical failure patterns on a chip after electrical testing. The electrical failure patterns In the discriminant device, the graphic extraction module is used to obtain two of the electrical failure graphics, and the feature comparison module is used to compare whether the two electrical failure graphics have a relationship of inclusion and inclusion, and if so, it belongs to one of the included parties. The classification priority of the electrical failure figure is higher than the classification priority of another electrical failure figure belonging to the included party, if not, the classification priority of the two electrical failure figures is the same. The use of the electrical failure pattern discrimination device helps to avoid the problem of classification error caused by the pattern features having the relationship of containing and being contained, and improves the accuracy of yield analysis. The invention additionally provides a method for discriminating electrical failure patterns.

Description

technical field [0001] The invention relates to the field of integrated circuits, in particular to an electrical failure pattern discrimination device and a classification method. Background technique [0002] In the modern integrated circuit manufacturing process, chip processing needs to go through a series of process links such as cleaning, film formation, etching, heat treatment, etc., and each process may introduce various defects. Damage due to device defects is extremely costly. Under such conditions, by testing the chips on the wafer, analyzing the cause of failure, and obtaining factors affecting the chip yield to reduce device defects, that is, yield analysis has become an important link in integrated circuit manufacturing. [0003] When performing yield analysis on chip products such as dynamic random access memory (DRAM) chips, the arrangement of failed memory cells on the DRAM chip after the electrical test is usually analyzed, that is, the electrical failure p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66H01L21/67
CPCH01L22/20H01L21/67271H01L21/67288
Inventor 陈文丽
Owner CHANGXIN MEMORY TECH INC
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