Electrical failure pattern discrimination device and discrimination method

A technology for electrical failure and identification devices, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., and can solve problems such as high loss costs

Active Publication Date: 2020-04-03
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Losses due to device defects are extremely costly

Method used

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  • Electrical failure pattern discrimination device and discrimination method
  • Electrical failure pattern discrimination device and discrimination method
  • Electrical failure pattern discrimination device and discrimination method

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Embodiment Construction

[0045] When using electrical failure patterns to analyze the yield rate of chip products such as DRAM chips, the current process of analyzing electrical failure patterns is to select electrical failure patterns randomly or based on stored information (such as storage time, file name, etc.) for pattern feature discrimination And classified to obtain the number of failed chips under different failure categories and perform yield analysis.

[0046] The inventors found that, when discriminating and categorizing the graphic features of multiple electrical failure graphics, if the graphic features of the electrical failure graphics identified later in the sequence include a discriminated and classified electrical failure graphic feature, the electrical failure pattern judged later in the order will be preferentially classified into the same category as the identified and classified electrical failure pattern, but although the pattern features of the electrical failure pattern judged ...

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Abstract

The invention relates to the field of integrated circuits and provides an electrical failure pattern discrimination device and discrimination method. The device and the method are used for discriminating and classifying a plurality of electrical failure patterns on a chip after an electrical test. In the electrical failure pattern discrimination device, a pattern extraction module is used for obtaining two electrical failure patterns; a feature comparison module is used for comparing whether the two electrical failure patterns have an inclusion and inclusion relation or not; wherein if yes, the classification priority of one electrical failure pattern belonging to one included party is higher than the classification priority of the other electrical failure pattern belonging to the includedparty, and if not, the classification priorities of the two electrical failure pattern are the same. By utilizing the electrical failure pattern discrimination device, the problem of classification errors caused by inclusion and inclusion relations of pattern features can be avoided, and the accuracy of yield analysis is improved. The invention further provides an electrical failure pattern discrimination method.

Description

technical field [0001] The invention relates to the field of integrated circuits, in particular to an electrical failure pattern discrimination device and a classification method. Background technique [0002] In the modern integrated circuit manufacturing process, chip processing needs to go through a series of process links such as cleaning, film formation, etching, heat treatment, etc., and each process may introduce various defects. Damage due to device defects is extremely costly. Under such conditions, by testing the chips on the wafer, analyzing the cause of failure, and obtaining factors affecting the chip yield to reduce device defects, that is, yield analysis has become an important link in integrated circuit manufacturing. [0003] When performing yield analysis on chip products such as dynamic random access memory (DRAM) chips, the arrangement of failed memory cells on the DRAM chip after the electrical test is usually analyzed, that is, the electrical failure p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66H01L21/67
CPCH01L22/20H01L21/67271H01L21/67288
Inventor 陈文丽
Owner CHANGXIN MEMORY TECH INC
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