Heat dissipation bottom plate, heat dissipation element and IGBT module
A heat dissipation bottom plate and heat dissipation element technology, which is applied in the direction of electrical components, semiconductor devices, electric solid devices, etc., can solve the problems of limiting the efficiency of cooling liquid contact heat dissipation, large mold friction, and high mold cost, so as to improve heat dissipation performance and thermal expansion. Appropriate coefficient and the effect of improving binding force
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Embodiment 1
[0072] This embodiment is used to illustrate the heat dissipation bottom plate of the present disclosure and its preparation method. Including the following steps:
[0073] 1. Air pressure casting and infiltration forming AlSiC board: use air pressure infiltration chamber equipment to preheat the SiC substrate to 500-700 °C, pour aluminum in turn, vacuumize (remove gas, prevent product from producing pores), and fill with nitrogen Pressurize (4 ~ 10MPa, to promote the aluminum liquid to fill the mold evenly) and cool down to obtain an AlSiC plate;
[0074] 2. Nickel-plate the surface of the AlSiC plate, and the thickness of the nickel layer is 12 μm;
[0075] 3. Cold-spray copper on the first main surface of the nickel-plated AlSiC plate to form the first copper-spray layer, with a thickness of 100 μm;
[0076] 4. Surface cleaning of heat dissipation column: metal copper heat dissipation column is used, ultrasonically cleaned with washing oil powder solution, then ultrasonic...
Embodiment 2~7
[0080] Using the method and materials in Example 1, using different sizes and arrangements of cooling columns from Example 1, see Table 2.
Embodiment 8
[0082] The method and materials of Example 2 are used, except that the thickness of the first copper spraying layer is 200 μm.
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