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Mo-doped AlCrSiN/Mo self-lubricating film and preparation method thereof

A self-lubricating, doped technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of high cutting temperature, reduced friction, cutting hot cutting temperature, high friction coefficient, and achieve high temperature Thermal stability, good bond strength, effect of reducing friction coefficient

Inactive Publication Date: 2019-12-24
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The application of new technologies such as high-speed cutting, superhard cutting and dry cutting makes the traditional film unable to meet the needs of high-temperature cutting conditions. It is urgent to develop a tool film with self-lubricating function to reduce the friction between the knife and chips and reduce the cutting heat. , Reduce the cutting temperature, thereby improving tool life and processing efficiency
[0003] Quaternary AlCrSiN nanocomposite films, in which inner nanocrystalline nc-((Al,Cr)N is surrounded by amorphous phase a-Si 3 N 4 Wrapped, so that it has high hardness, high toughness and excellent thermal stability, it is suitable for the surface of cutting tools, but it has the disadvantages of high friction coefficient and high cutting temperature, which makes it difficult to guarantee the life of the tool and the surface quality of the workpiece

Method used

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  • Mo-doped AlCrSiN/Mo self-lubricating film and preparation method thereof
  • Mo-doped AlCrSiN/Mo self-lubricating film and preparation method thereof
  • Mo-doped AlCrSiN/Mo self-lubricating film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] In this example, the HiPIMS / Pulse DC composite magnetron sputtering system is used to make single crystal tungsten steel sheet (20mm×10mm×1.0mm), SUS304 stainless steel sheet (40mm×40mm×2.0mm) and cemented carbide substrate (35mm×35mm ×4.5mm) deposited AlCrSiN / Mo composite thin film. The film preparation process is as follows:

[0039] (1) All substrates were cleaned with ultrasonic cleaner in acetone and alcohol solution for 30 minutes respectively, and then cleaned with high-purity N 2 Blow dry, and then place it on the rotating rack facing the target in the vacuum chamber. figure 1It is the target material distribution map of high power pulsed and pulsed DC magnetron sputtering. It can be seen from the figure that the AlCrSi target is loaded on the pulsed DC power supply, and the CrMo target is loaded on the HiPIMS (HighPower Impulse Magnetron Sputtering) high-power pulse power supply.

[0040] The rotational speed of the rotating frame is selected as 2.5r / min, an...

Embodiment 2

[0056] In this example, the HiPIMS / Pulse DC composite magnetron sputtering system was used to make single crystal Si sheets (40mm×40mm×0.67mm), SUS304 stainless steel sheets (40mm×40mm×2.0mm) and cemented carbide substrates (35mm×35mm× 4.5mm) AlCrSiN / Mo composite thin film was deposited on it. The film preparation process is as follows:

[0057] (1) All substrates were cleaned with ultrasonic cleaner in acetone and alcohol solution for 30 minutes respectively, and then cleaned with high-purity N 2 Blow dry, and then place it on the rotating rack facing the target in the vacuum chamber. The CrMo target is loaded on a pulsed DC power supply, and the AlCrSi target is loaded on a HiPIMS (High Power Impulse Magnetron Sputtering) high-power pulse power supply.

[0058] The rotational speed of the rotating frame is selected as 2.5r / min, and the base distances of the targets are 80mm (AlCrSi target) and 280mm (CrMo target) respectively. The working gas and reaction gas in the coati...

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Abstract

The invention discloses a Mo-doped AlCrSiN / Mo self-lubricating film and a preparation method of the Mo-doped AlCrSiN / Mo self-lubricating film, and belongs to the technical field of films and preparation of the films. The AlCrSiN / Mo self-lubricating film is formed by doping Mo elements into a AlCrSiN film, the doping amount of the Mo elements is 0.3-6.3at.%, and the film is prepared on a substrateby adopting a high-power pulse magnetron sputtering technology and a pulse direct current magnetic control coating technology. The prepared AlCrSiN / Mo self-lubricating film is high in hardness, good in toughness, excellent in wear reduction property and capable of remarkably reducing friction between a cutter and chip, and has good chemical stability and easy-to-shear lubricating property.

Description

technical field [0001] The invention relates to the technical field of thin films and their preparation, in particular to a Mo-doped AlCrSiN / Mo self-lubricating thin film and a preparation method thereof. Background technique [0002] With the rapid development of modern industrial technology, various difficult-to-machine materials are increasing, and higher requirements are placed on the cutting performance of tools. Coating thin films on the surface of tool substrates can effectively improve tool life. The application of new technologies such as high-speed cutting, superhard cutting and dry cutting makes the traditional film unable to meet the needs of high-temperature cutting conditions. It is urgent to develop a tool film with self-lubricating function to reduce the friction between the knife and chips and reduce the cutting heat. , Reduce the cutting temperature, thereby improving tool life and processing efficiency. [0003] Quaternary AlCrSiN nanocomposite film, in w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02
CPCC23C14/0641C23C14/352C23C14/0036C23C14/024C23C14/3485
Inventor 王铁钢蒙德强刘艳梅阎兵许人仁尹照星
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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