Machine equipment of semiconductor or photovoltaic material

Abstract

The invention discloses machining equipment of a semiconductor or a photovoltaic material. The machining equipment comprises a furnace body and a furnace door; an electrode structure is arranged on the furnace door, an adjusting device is arranged on the furnace door and comprises an arc contact surface and a support block; the arc contact surface is arranged between the support block and the furnace door, and a structure matched with the arc contact surface is arranged at a corresponding location of the support block or the furnace body. The invention provides the machining equipment of the semiconductor or photovoltaic material, and the machining equipment is simple in structure, reasonable in electrode mechanism design, capable of realizing longitudinal arrangement of a graphite boat piece due to the perfect combination of the furnace door, and capable of quickly adjusting the furnace door to reach good sealing effect.

Description

technical field [0001] The invention relates to the field of semiconductor or photovoltaic material processing, more specifically, it relates to a semiconductor or photovoltaic material processing equipment. Background technique [0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually require chemical treatment before they can be applied to products. CVD technology is one of the processing methods. CVD is chemical vapor deposition. CVD technology is currently It has been widely used in the processing of semiconductor or photovoltaic materials. Common processing equipment includes PECVD, LPCVD, APCVD, etc. In addition to CVD, there are also diffusion processes, such as phosphorus diffusion, boron diffusion, etc., which can use gas diffusion to treat raw materials. Processing. At present, there are many related equipment in the industry. The corresponding equipment can be ...

AI Technical Summary

Problems solved by technology

[0003]The following problems exist in the current equipment: graphite boats are usually large in size, and generally can reach about 2 meters if placed horizontally, and the electric field is transmitted from the tail of the entire graphite boat to the front There will be great differences in the parts, and it is difficult to obtain a uniform electric field

Since the sheet material needs to be placed vertically, the surface of the sheet material and the surface of the graphite boat will not be tightly bonded, resulting in poor electrical conductivity of the sheet material. Black edges are produced, and there is a risk of rewinding, resulting in an increase in the rate of defective products

[0004] Moreover, the furnace door of the corresponding existing equipment is sealed by the way that the sealing plate is in contact with the furnace frame, and the sealing plate is a buckle type, that is, the sealing plate passes through The buckle is fixed on the furnace door. When the furnace door is not tightly sealed, the operator pushes the sealing plate forward to seal by tapping the buckle. However, after a long period of use, the position where the sealing plate contacts the furnace frame is severely worn. When the furnace door and the furnace frame are sealed by the sealing plate, the seal will not be tight, which will cause smoke from the furnace door, affect the environmental sanitation, and also have a serious impact on the economic and social benefits of the enterprise

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