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High-density nanometer material vapor preparation method

A nano-material and high-density technology, which is applied in the field of gas-phase preparation of high-density nano-materials, can solve the problems of difficulty in synthesizing high-density nano-materials, high heat source energy, and increased costs, and achieves adjustable particle size, low heat source energy, and equipment mature effect

Active Publication Date: 2019-11-22
SHAANXI NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the temperature gradient in the reactor is small, the synthesized nanoparticles are not only large in size, but also easy to agglomerate and sinter, and easily lead to carbon pollution
In addition, the gas-phase nanomaterials synthesized by flame-assisted chemical vapor deposition technology are within the flame range, and the flame temperature is as high as thousands of degrees Celsius, which limits the in-situ measurement and application of the gas-phase state nanomaterials obtained by this method.
[0008] The density of gas-phase nanomaterials prepared by the prior art generally does not exceed 10 10 piece / cm 3 , if it is necessary to further increase the density of prepared nanomaterials, it is necessary to further enlarge the preparation equipment and additionally use ion traps to increase the density of prepared nanomaterials, which will greatly increase the cost
[0009] In summary, although the gas phase preparation of nanomaterials has undergone considerable development since its invention, the method still has problems such as high heat source energy required and difficulty in synthesizing high-density nanomaterials that need to be resolved urgently.

Method used

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preparation example Construction

[0028] The specific preparation method can be realized through the following steps:

[0029] (1) Under vacuum conditions, the substrate in the chamber is cooled, and the raw materials in the state of atoms, molecules or nanoparticles are deposited on the substrate while passing inert gas or reactive gas into the chamber. Raw materials in the state of molecules or nanoparticles are mixed and solidified together on the substrate to form a mixed target; in order to freeze gaseous molecules, it is necessary to ensure that the cooling temperature of the substrate is lower than the freezing point of the gaseous molecules. specifically is:

[0030] (1.1) Under vacuum conditions, the substrate in the chamber is cooled to below the freezing point of gas molecules;

[0031] (1.2) Pass inert gas or reactive gas into the chamber, so that the gas molecules passed in are mixed with the raw materials in the state of atoms, molecules or nanoparticles in the chamber and solidified together on...

Embodiment 1

[0042] Now take the preparation of high-density gas-phase Ag nanomaterials as an example, the specific method is as follows:

[0043] (1) Use a molecular pump to pump the vacuum chamber to 1*10 -5 Below Pa, the temperature of the oxygen-free copper substrate is cooled to 170K by passing through liquid nitrogen; at the same time, the electron beam evaporation source and the CO 2 Mass flowmeter, the evaporation material of the electron beam evaporation source is high-purity Ag (99.99%), the emission current is adjusted to 300nA, the mass flowmeter CO 2 The gas flow rate was adjusted to 12 sccm, the deposition time was set to 15 minutes, and the CO 2 Gas molecules mix with Ag in atomic or nanoparticle state and co-solidify on the substrate to form Ag-CO 2 Mixed targets.

[0044] (2) After the deposition is completed, turn off the electron beam evaporation source and the mass flow meter at the same time, turn on the laser generator, adjust the laser optical path and focus on th...

Embodiment 2

[0048] Taking the preparation of high-density gas-phase Ag nanomaterials as an example, the specific method is as follows:

[0049] (1) The molecular pump pumps the vacuum chamber to 1*10 -5 Below Pa, the temperature of the oxygen-free copper substrate is cooled to 130K by passing through liquid nitrogen, and at the same time, the electron beam evaporation source and the CO 2 Mass flowmeter, the evaporation material of the electron beam evaporation source is high-purity Ag (99.99%), the emission current is adjusted to 300nA, the mass flowmeter CO 2 The gas flow rate was adjusted to 8 sccm, the deposition time was set to 15 minutes, and the CO 2 Gas molecules mix with Ag in atomic or nanoparticle state and co-solidify on the substrate to form Ag-CO 2 Mixed targets.

[0050] (2) After the deposition is completed, turn off the electron beam evaporation source and the mass flow meter at the same time, turn on the laser generator, adjust the laser optical path and focus on the s...

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Abstract

The invention relates to a high-density nanometer material vapor preparation method. Under a low temperature and vacuum condition, raw materials in an atom, molecule or nano-particle state are mixed with gas molecules to form a mixed target material; and then solidified gas molecules are instantaneously gasified through being excited; the frozen raw materials in the atom, molecule or nano-particlestate are evaporated from the surface of the mixed target material to form a high-density nanometer material; and the theoretical calculated density of the high-density nanometer material can be larger than 1021 materials per cubic metre. The nanometer material prepared through the high-density nanometer material vapor preparation method not only has the advantages of high purity, controllable density and controllable particle size of the nanometer material prepared through a traditional vapor preparation method but also has the advantages that the heat source energy needed by the preparationprocess is low, the high-density nanometer material can be obtained, and mass and scale production of the nanometer material can be realized.

Description

technical field [0001] The invention belongs to the technical field of nanomaterial synthesis, and in particular relates to a gas-phase preparation method of high-density nanomaterials. [0002] technical background [0003] Gas-phase synthesis of nanomaterials is carried out in a vacuum or inert atmosphere, which not only ensures the purity of the prepared materials, but also can be used to prepare highly active nanomaterials (such as rare earths, alkaline earth metals, alkali metals, etc.). On the other hand, there is no waste liquid discharge in the preparation process, which is in line with the current concept of green chemical synthesis. Therefore, the technical research of gas-phase preparation of nanomaterials has been attracting attention. The methods of vapor phase synthesis of nanomaterials mainly include inert gas condensation technology and chemical vapor phase condensation technology. No matter which synthesis method involves the gasification of raw materials, t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F9/12C01G9/03B82Y40/00
CPCB22F9/12B82Y40/00C01G9/03
Inventor 尹峰冷德营唐厚炳张亚峰
Owner SHAANXI NORMAL UNIV
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