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Acid etching solution

A technology of acid etching solution and nitric acid, which is applied in the field of etching solution, can solve the problems of high production cost and low amount of dissolved copper, and achieve the effects of reducing corrosion, increasing the amount of dissolved copper, and increasing the etching rate

Inactive Publication Date: 2019-11-12
深圳市祺鑫环保科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the single-liquid type acidic etching solution has a high etching efficiency, but its copper-dissolving amount is generally low, and the copper ion content is about 100g / L; while the two-liquid type acidic etching solution has a high copper-soluble amount, but its etching efficiency is relatively low. The single-liquid acid etching solution is reduced by about 30%, and its production cost is high

Method used

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preparation example Construction

[0025] Simultaneously, the present invention also provides a kind of preparation method of laboratory acid etching solution, comprises the following steps:

[0026] Step 1) Take multiple dry and clean 250ML beakers on the workbench;

[0027] Step 2) Add 200ML stock solution to the beaker in step 1) (the stock solution was purchased from a large etching solution company in South China, and the stock solution contains hydrochloric acid, ammonium chloride and copper chloride);

[0028] Step 3) In the beaker where the original solution is added in step 2), add one or a combination of alkali metal salts, sulfamic acid, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, ammonium bicarbonate and amino One or a combination of sulfonic acid, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, ammonium bicarbonate;

[0029] Step 4) stirring and heating to 50° C. to obtain the final acidic etching solution.

[0030] In the above preparation method, the whole experi...

Embodiment

[0032] Embodiment is as follows: (wherein % represents: the mass percent of this material component in acidic etching solution)

[0033]

[0034]

[0035] In the present embodiment group, select control group composition list as follows: (wherein % represents: the mass percent of this material component in acidic etching solution)

[0036]

[0037]

[0038] Wherein, the determination method of the amount of dissolved copper (unit: g / L) is: under the ammonia water-ammonium chloride environment of pH=10, it is measured by complexometric titration analysis of EDTA standard buffer solution, and the indicator is PAN.

[0039] The etching rate (unit: um / min) is:

[0040]

[0041] Among them, the mass unit before and after etching: g;

[0042] The etching area is the area of ​​the etching rate slice, unit: cm2;

[0043] Etching time is the time when the etching rate sheet is in contact with the acidic etching solution, unit: min.

[0044] The etching result of using...

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Abstract

The invention discloses an acid etching solution. The acid etching solution comprises hydrochloric acid, ammonium chloride, copper chloride, alkali metal salt, and one of or combination of ammonium nitrate, potassium nitrate, nitric acid and urea, and water serves as the solvent. According to the acid etching solution provided by the technical scheme, the high-concentration copper dissolving amount of the acid etching solution during an etching reaction can be ensured, and the high-speed etching efficiency can be kept.

Description

technical field [0001] The invention relates to the technical field of etching solution, in particular to an acid etching solution. Background technique [0002] In the manufacturing process of integrated circuits, it is necessary to accumulate various materials, photolithography of the layer that needs to be partially or completely exposed, or the etching of the layer is repeated many times, among which the etching of the layer of metal or metal compound is particularly important. craft. In the above etching process, acid etching is an essential process in the process of manufacturing printed circuit boards, and the acid etching process is completed in an etching machine using an acid etching solution. At present, in the PCB industry, there are mainly two types of acid etching solutions: single-liquid type and double-liquid type. Among them, the single-liquid type acidic etching solution has a high etching efficiency, but its copper-dissolving amount is generally low, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/18
CPCC23F1/18
Inventor 李再强黄文涛梁民
Owner 深圳市祺鑫环保科技有限公司
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