Constant-pressure polishing device for aspheric optical element and constant-pressure polishing method thereof

Abstract

The invention discloses a constant-pressure polishing device for an aspheric optical element. The device comprises a rotating assembly which is used for arranging a workpiece and driving the workpiece to rotate, a polishing part which is in contact with the workpiece and is used for polishing the workpiece, a polishing shaft for arranging the polishing part, a first linear driving device which is connected to the rotating assembly and is sued for driving the rotating assembly to linearly move and driving the workpiece to axially move along the polishing shaft, and a movement controller which is connected to the rotating assembly and the first linear driving device, wherein the movement controller is used for controlling the rotating assembly and the first linear driving device to synchronously move; a preset correspondence relation is generated between the output displacement of the first linear driving device and the output rotating angle of the rotating assembly, so that the position difference of each processing position, in the axial direction of the polishing shaft, of a molded surface of the workpiece in the rotating process of the rotating assembly can be compensated through the output displacement. The device is high in processing accuracy; the stability of the polishing removing capacity is ensured; and the polishing is uniform and reliable. The invention also discloses a constant-pressure polishing method of the aspheric optical element.

Description

technical field [0001] The invention relates to the technical field of optical element processing equipment, and more specifically relates to a constant-pressure polishing device for aspheric optical elements. In addition, the present invention also relates to a constant-pressure polishing method for an aspheric optical element, which is applied to a constant-pressure polishing device for the above-mentioned aspheric optical element. Background technique [0002] In the field of precision and ultra-precision machining technology, the polishing accuracy of optical components has an important impact on the optical performance of the optical system. In the process of polishing optical components, the contact pressure between the polishing head and the processing element is the key factor affecting the removal amount of the workpiece surface. The contact pressure between the polishing head and the processing element is unstable, which will lead to the polishing of the workpiece ...

AI Technical Summary

Problems solved by technology

However, this compensation method is more suitable for workpieces with consistent surface dimensions, which can ensure the stability of feed rate and contact pressure; for curved surface processing components, when different processing positions on the curved surface are in contact with the polishing head, each processing position is different from the polishing head. The contact pressure between the polishing heads changes in real time, causing real-time fluctuations in the polishing heads, and at the same time the feed rate changes in real time, that is, the processing parameters such as contact pressure and feed rate change in real time, which is very unfavorable to the workpiece processing. should be avoided as much as possible in

Images