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Magnetic nanoparticle composite film and preparation method thereof

A magnetic nanoparticle and magnetic particle technology, applied in the direction of magnetic film, magnetic layer, magnetic object, etc., can solve the problems of particle size and distribution unevenness, nanoparticle composite film merged growth and difficult size control, etc., to achieve saturation magnetization Effects of improving, changing electrical properties, and reducing grain size

Active Publication Date: 2019-06-14
NORTHEASTERN UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the combined growth and size of nanoparticle composite films are difficult to control, and the particle size and distribution are not uniform, which limits the further improvement of the magnetic properties of nanoparticle composite films.

Method used

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  • Magnetic nanoparticle composite film and preparation method thereof
  • Magnetic nanoparticle composite film and preparation method thereof
  • Magnetic nanoparticle composite film and preparation method thereof

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Embodiment 1

[0037] Fe 20 Ni 80 The evaporation rate at 1375°C is 0.916nm / min, and the evaporation rate of SiO at 982°C is 0.238nm / min. Fe 20 Ni 80 - The SiO layer is deposited at the above rate for 6min33s, and the insulating layer SiO is deposited at the above rate for 4min12s, alternately deposited 5 times. The preparation method of magnetic nano particle composite film comprises the following steps:

[0038] Step 1, substrate selection and pretreatment:

[0039] Select a polished silicon wafer with a surface roughness of less than 0.5nm and a crystal orientation of (100), ultrasonically clean the silicon wafer in acetone, deionized water, and alcohol solution for 15 minutes, and dry it with a high-purity argon high-pressure spray gun;

[0040] Step 2, raw material preparation:

[0041] The raw material used is Fe with a diameter of 1mm 20 Ni 80Granules and SiO particles with a diameter of 3mm, the purity of the raw materials is 99.999%. Put the two raw materials into two custom...

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Abstract

The invention discloses a magnetic nanoparticle composite film and a preparation method thereof, and belongs to the technical field of magnetic material control of film materials. In the magnetic nanoparticle composite film, the composite film is formed by continuously and alternately depositing a magnetic layer and an insulating layer, and the composite film has a thickness of 15-100 nm; and themagnetic layer is a layer film formed by uniformly embedding magnetic particles in an insulating medium, the component of the magnetic particles is Fe or Fe-Ni, the volume fraction of the magnetic particles is 80-95%, and the thickness of the magnetic layer is 1-20 nm; and the insulating layer is composed of an insulating medium and has a thickness of 0.1-10nm. The magnetic nanoparticle compositefilm prepared by the invention can control the merging and grow of the nanoparticles, the particle size and the distribution uniformity and the like, thereby improving the magnetism while realizing grain refinement. The composite film prepared by using the preparation method provided by the invention is particularly suitable for electronic components in the field of digital electronic industry andcommunication technology.

Description

technical field [0001] The invention belongs to the technical field of magnetic control of thin film materials, and in particular relates to a magnetic nanoparticle composite film and a preparation method thereof. Background technique [0002] The development of digital electronics industry and communication technology requires the development of electronic components in the direction of high integration, high frequency and nanometerization. The magnetic thin film as the core material will produce special electromagnetic phenomena such as giant conductance effect, giant magnetoresistance effect, giant Hall effect and so on after nanometerization. This makes magnetic nano-films widely used in high-density storage, magnetoresistance sensors, high-frequency sensors, micro-electromechanical systems, micro-transformers, anti-electromagnetic interference, and microwave absorption. [0003] Nanoization refers to controlling the grain size within the range of 1-100nm. Sometimes th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F10/00H01F10/14H01F41/32
Inventor 李国建常玲刘诗莹刘晓明王强
Owner NORTHEASTERN UNIV
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