Method for improving spatial resolution of X-ray energy dispersive spectrometer for scanning electron microscope

Abstract

The invention discloses a method for improving a spatial resolution of an X-ray energy dispersive spectrometer for a scanning electron microscope. The method comprises the following steps: mixing particles or fibrous samples into an embedding agent and a curing agent, stirring, pouring the particles or the fibrous samples into a silicon mold, curing, and demoulding and taking out the particles orfibrous samples after being cooled; cutting a sample sheet with a thickness of 10 to 500nm and then transferring the sample sheet to a copper mesh; fixing the copper mesh loaded with the sample sheeton a copper mesh bracket, and enabling the copper mesh bracket to be in contact and fixed with the edge of the copper mesh; and pushing a crystal detector to the vicinity of an objective pole shoe ofthe electron microscope to increase a solid angle to 0.01 to 0.05sr, adjusting relevant parameters, and then performing an energy spectrum test. According to the method for improving the spatial resolution of the X-ray energy dispersive spectrometer for the scanning electron microscope provided by the invention, the spatial resolution in the X-ray energy spectrum test can be greatly improved underthe synergistic effect of appropriate thinning of the thickness of the sample, proper setting of various test parameters and other treatment measures, and a basis is provided for accurate experimenttest results.

Description

technical field [0001] The invention belongs to the technical field of scanning electron microscope accessory X-ray energy spectrometer testing, and in particular relates to a method for improving the spatial resolution of its testing Background technique [0002] Energy X-ray spectrometer (EDS), as a standard accessory of the scanning electron microscope, can use the characteristic X-rays generated after the interaction between the incident electron beam and the sample to perform rapid qualitative and quantitative analysis of the element composition of the selected micro-region in the sample and Characterization of element surface distribution makes it a very widely used testing tool. However, since high-energy incident electrons enter the interior of the sample, they will undergo elastic and inelastic scattering with their atoms, causing the interaction region to expand laterally and vertically, and the size of the region can reach as large as submicron and micron; The ch...

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Problems solved by technology

However, since high-energy incident electrons enter the interior of the sample, they will undergo elastic and inelastic scattering with their atoms, causing the interaction region to expand laterally and vertically, and the size of the region can reach as large as submicron and micron; The characteristic X-ray energy generated is very high, which can be generated in the entire interaction area and the signal can be emitted to the sample surface and detected by the X-ray energy spectrometer. Therefore, the interaction area adjacent to the incident point in the sample is due to the range Large and overlap occurs, which also leads to serious element overlap errors in energy spectrum detection, that is, the actual collection area of ​​the element is seriously inconsistent with the selected area of ​​the sample. This situation is also called poor spatial resolution of energy spectrum testing. At the same time, it is also susceptible to the interference of the characteristic X-rays of the substrate material, thus affecting the final experimental results, especially the qualitative and quantitative analysis of samples such as nano-scale particles or thin films and the distribution of elements on the surface.

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