Dynamic clean maintenance system and method for high power terminal optical system

Abstract

The invention discloses a dynamic clean maintenance system and method for a high power terminal optical system, and belongs to the technical research field of high power laser devices. The system comprises a laminar flow unit and a wind knife unit, the laminar flow unit is used for providing dynamic clean laminar flow, and the wind knife unit is used for providing a high pressure air knife air curtain. During the long-term operation of the high power terminal optical system, the life of optical elements is greatly shortened due to the fact that dust and aerosol pollutants produced by targetingare deposited on the surface of the internal optical elements in the high power terminal optical system, and the clean control of the terminal optical elements becomes a bottleneck of limiting the high throughput operation of the device; therefore, a technical measure for realizing the surface clean control of the optical elements by coupling the wind knife air curtain protection and the clean laminar flow protection is provided, the dust and aerosol pollutants produced by targeting can be prevented from being attached to the surfaces of the optical elements and are discharged out of the terminal optical system in time, so that the surface cleanliness of the optical elements in the terminal optical system is maintained for a long time.

Description

technical field [0001] The invention relates to the technical research field of high-power laser devices, and specifically relates to a dynamic cleaning maintenance system and method for cleaning and purging optical elements in high-power terminal optical systems. Background technique [0002] In high-power laser devices, the load capacity of optical components is one of the determining factors for the output capacity of the device, and the cleanliness of optical components directly affects the load capacity of optical components. Research has found that optical components will produce a large amount of dust and aerosol pollutants under laser irradiation conditions, especially when the optical components have surface damage, the pollutants will increase in multiples; once micron-sized pollutants adhere to the surface of optical components, It is extremely difficult to remove by airflow blowing. On the other hand, the terminal optical system has a variety of placement method...

AI Technical Summary

Problems solved by technology

The terminal optical system of the National Ignition Facility in the United States and a large-scale laser device in China have adopted the small-volume gas replacement technology in the atmosphere chamber environment. The long-term operation results show that the cleanliness of the surface of the optical components has not been effectively solved, and deposits in the terminal optical system A large number of dust and aerosol pollutants generated after the damage of optical components lead to rapid contamination of clean optical components after they are put on the shelf, and the life of optical components is greatly shortened. This has become a bottleneck that limits the load capacity and high-throughput operation of the drive.

[0004] To sum up, the cleanliness of the terminal optical system of high-power laser devices is the main factor limiting the load capacity of the terminal optical components, and the existing cleaning control methods cannot effectively guarantee the cleanliness of the terminal optical components and even the terminal cavity, which greatly The improvement of the output capability of high-power laser devices is limited. Therefore, an effective cleaning and purging method for the terminal optical system is required to improve the load capacity of the terminal optical components

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