Arc ion plating device

Abstract

The invention discloses an arc ion plating device. The device comprises a vacuum chamber, a hall ion source and arc ion sources; the arc ion sources excite a target material adopting a pulse dischargemode, the deposition temperature is low, the surface smoothness of a coating is good, and an elastomer product can be plated under a low-temperature condition. The device comprises two or more arc ion sources, and each ion source is installed at a certain inclination angle with the side wall of the vacuum chamber, the plating uniformity and the plating speed can be guaranteed, and the requirements of industrial batch production can be met. The device has the advantages of being low in plating temperature, good in plating uniformity, high in plating speed and the like.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and relates to an arc ion coating device, in particular to an arc ion coating device for depositing a diamond-like coating on the surface of an elastomer product. Background technique [0002] Diamond-like coatings have the characteristics of both diamond and graphite, have high hardness and excellent tribological properties, and are often used as wear-resistant coatings. Using arc ion plating to deposit diamond-like coatings, the ionization rate of the target is as high as 95%, the deposition rate is high, and the bonding force between the coating and the substrate is strong. [0003] However, in the existing arc ion plating equipment, the arc source adopts the form of DC arc discharge, and the energy input at the discharge spot is high. First, larger droplets will be deposited in the coating together with the ion flow to become macroscopic particles. Reduce the surface finish of the coa...

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Problems solved by technology

[0003] However, in the existing arc ion plating equipment, the arc source adopts the form of DC arc discharge, and the energy input at the discharge spot is high. First, larger droplets will be deposited in the coating together with the ion flow to become macroscopic particles. Reduce the surface finish of the coating, and will form penetrating defects in the coating, greatly reducing the performance of the coating

Second, the heating effect at the discharge spot of the ion source leads to a high local temperature. At the same time, the high-density ion flow generated by the DC discharge continuously bombards and heats the surface of the workpiece. The overall heating effect leads to a high deposition temperature of the traditional arc ion plating device, which cannot Deposition of diamond-like carbon coating on the surface of elastomer products with poor temperature resistance

[0005] To remove macroscopic particles by filtration, additional filtration devices must be added, which will not only increase the cost, but also reduce the deposition rate

The use of circulating cooling water cannot change the energy of the ion flow, and the temperature cannot be controlled from the source; the introduction of negative bias voltage, regardless of the bias voltage, will increase the energy of the ion flow, and the surface temperature of the workpiece is generally above 100°C, which cannot affect the temperature resistance. Poor elastomeric products for coating

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