X-ray-based metal surface infiltrated layer thickness non-destructive detection device and method
An X-ray and permeable layer technology, applied in the field of surface engineering technology and precision inspection, can solve the problems of different diffusion rates, inability to detect effectively, and no obvious physical interface, so as to improve work efficiency and realize the effect of full inspection of products
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[0023] Embodiments of the present invention are described in detail below, and the embodiments are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.
[0024] The X-rays are used to impact the tested sample to generate secondary X-rays. Since the secondary X-rays generated by different elements have different energy and wavelength characteristics, according to Moseley's law Among them, Q and δ are constants, so a certain element can be qualitatively or quantitatively analyzed by collecting X-ray fluorescence photons of different wavelengths.
[0025] Based on the above principles, there are currently many X-ray detection equipment that can receive the secondary X-ray photons produced by different elements under the impact of X-rays through a detector with a certain area, and then obtain the content of each element in it, and for a single coating, also Coating thickness can be measured. As for the diffusion ...
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