A monolithic integrated optical accelerometer

Abstract

The invention discloses a monolithic integrated optical accelerometer. The monolithic integrated optical accelerometer comprises a wide spectrum light source, an acceleration sensitive unit, a photoelectric detector, a substrate, a refrigeration sheet and a packaging shell. The acceleration sensitive unit integrates a mode spot converter, a 1:2 type Y waveguide, a 2:1 type Y waveguide modulator and a metal electrode; the light of the wide spectrum light source is coupled into the 1:2 type Y waveguide through the mode spot converter to realize 3dB light splitting, two beams of light enter the 2:1 type Y waveguide modulator after passing through the upper branch and the lower branch of the 1:2 type Y waveguide, and finally are directly coupled into the photoelectric detector. The optical accelerometer adopts a Mach-Zehnder interferometer structure, detects the phase difference of two interference arms caused by external acceleration, is not influenced by light intensity fluctuation of alight source, has high detection precision, is integrated on the same substrate by a single chip, has high integration level, small volume and simple manufacturing process, and has high reliability and environmental adaptability.

Description

technical field [0001] The invention belongs to the technical field of integrated optics and inertial sensing, in particular to a single-chip integrated optical accelerometer. Background technique [0002] In recent years, MEMS accelerometers have been widely used in automotive, aerospace and consumer electronics. Among them, capacitance-based accelerometers are simple and mature to manufacture, making them one of the most widely used accelerometers. However, there are some disadvantages based on capacitive sensing mechanism, such as curling effect, parasitic capacitance and small capacitance change caused by acceleration, etc. The accuracy of the accelerometer using the capacitive type is limited, and it is not suitable for the environment of strong electromagnetic interference. The optical accelerometer using optical sensing can overcome the above shortcomings, and has the advantages of high precision, anti-electromagnetic interference, and ability to work in harsh envir...

AI Technical Summary

Problems solved by technology

The accuracy of the light intensity sensitive accelerometer is affected by the power stability of the light source in the accelerometer, and the accuracy is low

Phase-sensitive optical accelerometers are mainly composed of discrete optical devices. By detecting phase changes, they are not affected by light source power fluctuations and have high theoretical accuracy. However, they are large in size and low in integration and are not suitable for commercial use.

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