Preparation method of transition state oxidation nickel-chromium film layer and toughened low-emissivity coated glass containing transition state oxidation nickel-chromium film layer
A low-emission coating, nickel-chromium oxide technology, used in sputtering, coating, ion implantation, etc., can solve the problems of waste of financial and material resources, affect the appearance and image, delivery troubles, etc., to improve the transmission rate. Emissivity, good appearance color, the effect of reducing emissivity
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[0026] A method for preparing a transition-state nickel-chromium oxide film layer, comprising the following steps: using a NiCr alloy target material, under the control of a DC power supply or a DC pulse power supply, maintaining the background vacuum degree of the magnetron sputtering coating equipment to be better than 5 ×10 -4 Pa, at the process atmosphere point, the reactive sputtering method is used to deposit sequentially on the surface of the previous film layer. The above process atmosphere point corresponds to an argon-oxygen atmosphere, and the flow ratio of argon and oxygen is 8 / 1 -12 / 1, the transition state nickel-chromium oxide film is obtained. The thickness of the transition state nickel-chromium oxide film layer is preferably 1.5-5 nm.
[0027] The flow rate ratio of argon and oxygen corresponding to the above process atmosphere point is obtained by the following method:
[0028] Keep the background vacuum of the magnetron sputtering coating equipment better ...
Embodiment 1
[0044] A toughened double-silver low-emissivity coated glass, comprising a glass substrate 100 and a composite film layer 200 plated on the surface of the glass substrate 100, the film layer structure of the composite film layer 200 and the thickness of each film layer are as follows:
[0045] Silicon nitride layer (22nm) / zinc oxide layer (10nm) / silver layer (10nm) / first transition state nickel-chromium oxide film layer (1.5nm) / zinc tin oxide layer (30nm) / silicon nitride layer (20nm) / zinc oxide layer (15nm) / silver layer (17nm) / second transition state nickel-chromium oxide film layer (5nm) / zinc oxide layer (10nm) / silicon nitride layer (24nm);
[0046] The above-mentioned first transition state nickel-chromium oxide film layer and the second transition state nickel-chromium oxide film layer are prepared according to the preparation method of the transition state nickel-chromium oxide film layer of the present invention. In this example, the first transition state nickel-chromium...
Embodiment 2
[0055] A temperable triple-silver low-emissivity coated glass, comprising a glass substrate 100 and a composite film layer 200 coated on the surface of the glass substrate 100, the film layer structure of the composite film layer 200 and the thickness of each film layer are as follows:
[0056] Silicon nitride (30nm) / zinc oxide (12nm) / silver (10nm) / first transition state nickel-chromium oxide layer (2nm) / zinc tin oxide (20nm) / silicon nitride (25nm) / zinc oxide (10nm) / Silver (12nm) / Second transition state nickel-chromium oxide layer (3nm) / Zinc tin oxide (30nm) / Silicon nitride (35nm) / Zinc oxide (10nm) / Silver (8nm) / Third transition state nickel oxide Chromium film (3nm) / zinc tin oxide (15nm) / silicon nitride (22nm);
[0057] The first transition state nickel-chromium oxide film layer, the second transition state nickel-chromium oxide film layer and the third transition state nickel-chromium oxide film layer are prepared according to the preparation method of the transition state n...
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