Mask process and mask plate group

Abstract

A mask process and a mask plate group are provided. The mask process includes: aligning the first mask with a stage carrying a substrate to be patterned; forming a first layer structure and a first set of etching and correcting patterns on a substrate to be patterned by using a first mask; using an image sensor and a first set of etching and correcting patterns for correcting; aligning the secondmask with the machine table; forming a second layer structure and a second set of etching and correcting patterns on a substrate to be patterned by using a second mask; and correcting by using the image sensor and the second set of etching and correcting patterns. The mask process can realize automatic alignment of products with thick film layer such as liquid crystal antennas without modifying the production line equipment, thereby realizing mass production of products with thick film layer such as liquid crystal antennas and reducing the cost.

Description

technical field [0001] Embodiments of the present disclosure relate to a mask process and a mask template set. Background technique [0002] With the continuous development of communication technology, 4G and 5G communication technology has gradually become the mainstream of the market. Moreover, with people's pursuit of thinner and lighter mobile phones, all walks of life in the industry pay more and more attention to the miniaturization and low cost of antennas. [0003] Compared with traditional horn antennas, helical antennas, and array antennas, liquid crystal antennas have the characteristics of miniaturization, broadband, multi-band, and high gain, and are more suitable for the current technology development direction. On the other hand, liquid crystal antennas and thin film transistor liquid crystal displays (TFT-LCDs) both include processes such as film formation, exposure, etching, cell alignment, and filling liquid crystals. Therefore, the manufacturing process o...

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Problems solved by technology

Therefore, this masking process can solve the problem that the existing production line equipment cannot automatically align products with thick film layers such as liquid crystal antennas, and can achieve thick film products such as liquid crystal antennas without modifying the production line equipment. The automatic alignment of products with layers, so that the mass production of products with thick film layers such as liquid crystal antennas can be realized, and the cost can be reduced; in addition, the mask process does not add additional process steps, thereby reducing the impact on production capacity

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