Flexible gas sensitive sensor based on gallium oxide/zinc gallate hetero-junction nano-array and preparation method thereof
A gas sensor and nano-array technology, which is applied in the field of gas sensing, can solve the problems of weak substrate bonding, poor stability, and difficult electrode production, and achieve the effects of rapid separation, stable performance, and improved gas sensing characteristics
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Embodiment 1
[0035] A method for preparing a flexible gas sensor based on a gallium oxide / zinc gallate heterojunction nanoarray, comprising the following steps:
[0036] (1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;
[0037] (2) Combine ZnO and Ga 2 o 3 The targets are respectively placed on the target stage of the magnetron sputtering deposition system, and the glass fiber cloth substrate processed in step (1) is fixed on the sample holder and put into the vacuum chamber;
[0038] (3) Preparation of ZnO thin film: vacuumize the chamber, adjust the pressure in the vacuum chamber, feed argon gas, heat the glass fiber cloth substrate, deposit a layer of ZnO thin film by magnetron sputtering, take it out for use, wherein , the distance between the ZnO target and the glass...
Embodiment 2
[0047] A method for preparing a flexible gas sensor based on a gallium oxide / zinc gallate heterojunction nanoarray, comprising the following steps:
[0048] (1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;
[0049] (2) Combine ZnO and Ga 2 o 3 The targets are respectively placed on the target stage of the magnetron sputtering deposition system, and the glass fiber cloth substrate processed in step (1) is fixed on the sample holder and put into the vacuum chamber;
[0050] (3) Preparation of ZnO thin film: vacuumize the chamber, adjust the pressure in the vacuum chamber, feed argon gas, heat the glass fiber cloth substrate, deposit a layer of ZnO thin film by magnetron sputtering, take it out for use, wherein , the distance between the ZnO target and the glass...
Embodiment 3
[0056] A method for preparing a flexible gas sensor based on a gallium oxide / zinc gallate heterojunction nanoarray, comprising the following steps:
[0057] (1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;
[0058] (2) Combine ZnO and Ga 2 o 3 The targets are respectively placed on the target stage of the magnetron sputtering deposition system, and the glass fiber cloth substrate processed in step (1) is fixed on the sample holder and put into the vacuum chamber;
[0059] (3) Preparation of ZnO thin film: vacuumize the chamber, adjust the pressure in the vacuum chamber, feed argon gas, heat the glass fiber cloth substrate, deposit a layer of ZnO thin film by magnetron sputtering, take it out for use, wherein , the distance between the ZnO target and the glass...
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