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Surface acoustic wave microfluidic chip and method for forming acoustic focal region with micrometer size

A microfluidic chip and surface acoustic wave technology, applied in the field of microfluidics, can solve the problem that the spatial resolution of the ultrasonic acoustic focal region can only be millimeter-level, and achieve diversified adjustment methods, convenient control, and expanded application space Effect

Active Publication Date: 2018-11-20
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the above-mentioned deficiencies of the prior art, provide a surface acoustic wave microfluidic chip and a method for forming a micron-sized acoustic focal region, and aim to solve the problem that the spatial resolution of the existing ultrasonic acoustic focal region can only be millimeter-level technical issues

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  • Surface acoustic wave microfluidic chip and method for forming acoustic focal region with micrometer size
  • Surface acoustic wave microfluidic chip and method for forming acoustic focal region with micrometer size

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preparation example Construction

[0036] The embodiment of the present invention also provides a method for preparing the above-mentioned surface acoustic wave microfluidic chip, which includes the following steps:

[0037] E01: Fabricate the first interdigital transducer and the second interdigital transducer on the surface of the piezoelectric substrate by photolithography, coating and lift-off processes;

[0038] E02: Fabrication of microfluidic systems using photolithography, casting and demolding processes;

[0039] E03: bonding the microfluidic system on the surface of the piezoelectric substrate.

[0040] Further, the specific steps of the preparation method of the above surface acoustic wave microfluidic chip are as follows:

[0041] 1) Preparation of surface acoustic wave chip: prepare interdigitated electrodes on the piezoelectric substrate material, the preparation process includes one or more of electron beam evaporation, magnetron sputtering, lift-off, soft lithography, through the above process ...

Embodiment 1

[0052] A surface acoustic wave microfluidic chip, such as figure 1 with figure 2 As shown, it includes a piezoelectric substrate 1 and a first interdigital transducer 2 and a second interdigital transducer 3 arranged on the piezoelectric substrate 1, and the piezoelectric substrate 1 is also provided with a micrometer for forming an acoustic focal region. A fluidic control system 5, the microfluidic system 5 is between the first IDT 2 and the second IDT 3; the microfluidic system 5 is provided with a closed internal flow channel 6, the internal flow channel 6 The bottom of the piezoelectric substrate 1, and the inner channel 6 includes a first channel 63 and a second channel 64 (see figure 2 ), the first flow channel 63 and the second flow channel 64 are on the same horizontal plane and contain parts perpendicular to each other, the first flow channel 63 is provided with the first fluid 61 of low acoustic impedance, and the second flow channel 64 is provided with a high-aco...

Embodiment 2

[0054] A method for forming an acoustic focal region, such as figure 1 with figure 2 shown, including the following steps:

[0055] S11: Provide the above-mentioned surface acoustic wave microfluidic chip according to Embodiment 1 of the present invention;

[0056] S12: Prepare the biological sample 7 to be tested, place the biological sample 7 on the top of the microfluidic system 5 on the surface acoustic wave microfluidic chip, and overlap with the second fluid 62;

[0057] S13: The surface acoustic wave 4 is transmitted through the first interdigital transducer 2 and the second interdigital transducer 3, and the surface acoustic wave 4 is not conducted through the first fluid 61 and the second fluid 62, in the microfluidic system 5 An independent acoustic wave region is formed and transmitted to the biological sample 7 at the top of the microfluidic system 5 to form an acoustic focal region, which can be obtained in the biological sample 7-stimulated neurons 71 and unst...

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Abstract

The invention belongs to the technical field of microfluidic, and specifically relates to a surface acoustic wave microfluidic chip and a method for forming an acoustic focal region with a micrometersize. The chip includes a piezoelectric substrate, a first interdigital transducer and a second interdigital transducer which are arranged on the piezoelectric substrate and on the same surface, and amicrofluidic system used for forming an acoustic focal region; the microfluidic system is arranged between the first interdigital transducer and the second interdigital transducer, and is provided with a closed internal flow channel; the internal flow channel is used for holing a first fluid and a second fluid; the first interdigital transducer and the second interdigital transducer are used forsending surface acoustic waves; the first fluid can conduct the surface acoustic waves, and the second fluid cannot conduct the surface acoustic waves; and the first fluid and the second fluid can form regular or irregular intervals through a microfluidic technology, so that the acoustic focal region can be generated. The chip can form and move the micron-sized acoustic focal region.

Description

technical field [0001] The invention belongs to the field of microfluidic technology, and in particular relates to a surface acoustic wave microfluidic chip and a method for forming a micron-sized acoustic focal region. Background technique [0002] Ultrasound can pass through thin bones and deep tissues, and can be focused to a millimeter-square area, making it a very suitable source of stimulation for stimulating deep neuronal populations. As early as 1929, Harvey et al. first publicly and clearly described the abnormal effects of ultrasonic stimulation of nerve fibers and muscle fibers. In 1955, Fry et al. pointed out that ultrasound can be used to study the structure and function of brain circuits. The stimulation effect of ultrasound should include two modes of excitation and inhibition, and the regulation effect is reversible. In 2008, Tyler et al. demonstrated for the first time the regulatory effect of ultrasound on the motor function area of ​​the mouse brain throu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02
CPCG01N29/022
Inventor 王晶晶陈艳
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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