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Laser-assisted thermal polarization equipment and method for microscopic second-order nonlinear susceptibility optical elements

A second-order nonlinear, optical element technology, applied in the field of visible-near-infrared optical system materials and devices, can solve the problems of complex process, expensive equipment, unsatisfactory resolution, etc., and achieves good application prospects and improved preparation efficiency.

Active Publication Date: 2020-10-16
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The previous modification mainly focused on ordinary micro-processing methods such as dry etching and photolithography. The disadvantages are that the equipment is expensive, the process is complicated, and the processing efficiency is low. Especially, photolithography is also affected by light.
But at present, the process of using continuous laser to thermally polarize glass cannot meet the needs of preparing visible-near-infrared optical materials. The process is complex, the resolution of patterning is not ideal, and the process controllability and production efficiency need to be improved

Method used

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  • Laser-assisted thermal polarization equipment and method for microscopic second-order nonlinear susceptibility optical elements

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Effect test

Embodiment 1

[0032] In this embodiment, a laser-assisted thermal polarization device for a microscopic second-order nonlinear susceptibility optical element uses a silver conductive coating to coat the niobium borophosphate (BPN) glass sample doped with Sm3+ ions. The ITO glass covered with silver wire is used as a cover glass on one side of the niobium borophosphate glass sample, and the ITO glass is used as the anode, and the silicon chip is used as the cathode, which is set under the other side of the niobium borophosphate glass sample. Silicon wafers, so as to form a sandwich device of ITO glass, niobium borophosphate glass samples and silicon wafers stacked and assembled, and connect the power supply for the ITO glass and silicon wafers, connect the heating power supply for the niobium borophosphate glass samples, and use it as a cover glass A laser is set above the ITO glass, so that the continuous laser with an emission wavelength of 1064nm passes through the ITO glass and directly r...

Embodiment 2

[0044] This embodiment is basically the same as Embodiment 1, especially in that:

[0045] In this embodiment, a method for laser-assisted thermal polarization of a microscopic second-order nonlinear susceptibility optical element includes the following steps:

[0046] a. This step is the same as in Embodiment 1;

[0047] b. Connect the catheter and the vacuum pump of the sealed stainless steel box assembled by the process device for preparing the optical element by thermal polarization in the step a to the external gas supply pipeline respectively, and firstly evacuate the box to the air pressure in the box by the vacuum pump 5Pa, it takes 20 minutes, then turn off the vacuum pump and fill the box with N 2 Gas to not less than 1.3bar, as the gas of the non-oxidative thermal polarization treatment process, remove the air, water vapor and dust in the box, and eliminate the influence of water vapor and dust in the air on thermal polarization;

[0048] c. This step is the same ...

Embodiment 3

[0055] This embodiment is basically the same as Embodiment 1, especially in that:

[0056] In this embodiment, a method for laser-assisted thermal polarization of a microscopic second-order nonlinear susceptibility optical element includes the following steps:

[0057] a. This step is the same as in Embodiment 1;

[0058] b. This step is the same as in Embodiment 1;

[0059] c. After completing the gas atmosphere setting in the process device for thermal polarization preparation of optical elements in the step b, under program control, use a heat conduction heating device to heat the sample from room temperature at a heating rate of 10°C / min doped Sm 3+ The ionic niobium borophosphate glass is kept warm at 300°C, and the niobium borophosphate glass is heated and kept for 15 minutes to make the temperature of the niobium borophosphate glass as a sample uniform, and place the niobium borophosphate glass in a uniform thermal field;

[0060] d. After completing the temperature ...

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Abstract

The invention discloses a laser-assisted thermal polarization device and method for a microscopy second order nonlinear polarizability optical element, which uses ITO glass coated with thin silver wire on a single face and a side face as anode, and uses silicon wafer as cathode. A continuous laser with wavelength of 1064 nanometers is used for carrying out microscopy thermal polarization on borophosphate laser glass doped with ions of Sm3+. The method assisted with a electric field, a thermal field and a laser field can be used for preparing a plurality of optical elements with micro-sized microstructures. The periodicity and morphology of a sample can be controlled by adjusting the laser parameters and the thermal polarization parameters. By using the method, an optical element with periodic microscopy second order nonlinear polarizability can be prepared at one time, the pattern resolution can reach micron or even nano level, the preparation efficiency can be increased by several times to dozens times compared with preparation of a traditional material, the shape and the atomic with microstructure distribution and size or the component of the molecular structure are controllable,and the preparation efficiency is high.

Description

technical field [0001] The invention relates to a preparation method of an optical element, in particular to a preparation method of an optical element with a microstructure, and is mainly used in the technical field of visible-near-infrared optical system materials and devices. Background technique [0002] In recent years, visible-near-infrared optical materials have been widely used in modern military and civilian high-tech fields such as information technology, laser technology and electronic communication technology. For crystal materials such as sapphire and diamond, it is difficult, inefficient, and costly to obtain aspheric lenses or prisms using traditional processes, and it is difficult to meet the rapidly developing optics and information technology requirements for miniaturization, integration, and functionalization of materials. Oxide glass materials have broad application prospects in visible-near-infrared optical systems due to their advantages such as low opt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/35G02F1/355G02F1/37
CPCG02F1/3501G02F1/3555G02F1/37
Inventor 杨光曹琎何晓燕王多金陈宏飞刘斌高彦峰
Owner SHANGHAI UNIV
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