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A silicon micromachined gyroscope with a four-column mass

A technology of silicon micromachines and quality blocks, which is applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve the problems of limiting gyroscope detection signal and sensitivity, high detection frequency, etc., and reduce output noise signal, improve the signal-to-noise ratio, and improve the effect of sensitivity

Active Publication Date: 2021-05-18
SOUTHEAST UNIV
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Problems solved by technology

However, the silicon micro gyroscopes developed by most institutions currently have high driving and detection frequencies, which limits the improvement of the gyroscope detection signal and sensitivity.

Method used

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  • A silicon micromachined gyroscope with a four-column mass
  • A silicon micromachined gyroscope with a four-column mass
  • A silicon micromachined gyroscope with a four-column mass

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Embodiment Construction

[0030] The technical solutions provided by the present invention will be described in detail below in conjunction with specific examples. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention.

[0031] The silicon micromechanical gyroscope with a four-column-shaped quality block that can realize vertical axis angular velocity sensitivity provided by the present invention, such as figure 1 with figure 2 As shown, it includes upper, middle and lower three-layer structures, wherein the upper layer is four cylindrical mass blocks, the middle layer is a silicon microsensor structure, and the lower layer is a boron-based glass substrate with electrode leads. Cylindrical mass blocks 1-1, 1-2, 1-3, 1-4 are arranged in the center of the four mass block trays in the middle layer silicon microsensor structure, and materials such as SU-8 / silicon / structural steel al...

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Abstract

The invention provides a silicon micromechanical gyroscope with a four-column mass block, which includes an upper mass block structure, a middle layer silicon microsensor structure, and a lower substrate structure. The upper mass block structure includes four cylindrical mass blocks, and the four The cylindrical mass blocks are respectively bonded to the center of the four mass block trays of the silicon microsensor structure, and the middle silicon microsensor structure is bonded to the lower substrate through anchor points; The four mass block trays around the detection substructure, the driving substructure connected between two adjacent mass block trays, and the connection between two adjacent mass block trays are also connected by detection coupling beams; electrode leads are arranged on the lower substrate. The gyroscope can be sensitive to the angular velocity of the vertical axis, and has the advantages of low driving and detection frequency and high sensitivity.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems and micro-inertial measurement, and relates to a silicon micromechanical gyroscope with a four-column-shaped quality block, and more specifically, relates to a four-column-shaped gyroscope that can be used for vertical axis angular velocity sensitivity. Mass silicon micromachined gyroscope. Background technique [0002] Micromechanical systems (MEMS) emerged in the 1950s with the development of integrated circuit IC manufacturing technology. By manufacturing integrated functional devices and units such as micro-mechanical structures, micro-sensors, micro-actuators, signal processing circuits, and power supplies on the chip, various functions such as sensing, measuring, and driving can be realized for external signals. As a foreword subject field that covers many disciplines such as mechanics, electronics, physics, chemistry, biology, and materials, microsystems are highly...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 杨波郭鑫高小勇李成冯雨
Owner SOUTHEAST UNIV
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