Preparation method of aluminum nitride raw ceramic sheet for high temperature co-fired ceramic
A high-temperature co-fired ceramic and aluminum nitride raw technology, which is applied in the field of microelectronic ceramic materials, can solve the problems of unsuitability for high-temperature co-fired ceramics, poor processing performance of green ceramic sheets, health hazards and other problems, and achieves good processing performance, Reduce the harm to the environment and contact personnel, good stability effect
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[0033] A kind of preparation method of aluminum nitride green ceramic sheet for high temperature co-fired ceramics proposed by the present invention comprises the following steps:
[0034] 1) Load grinding balls: put clean alumina grinding balls into the nano sand mill, the mass ratio of grinding balls to aluminum nitride powder is 5:1;
[0035] The nano sand mill can completely open the powder agglomeration, the grinding particle size is finer, and the sintering aid is dispersed more uniformly, which is beneficial to the sintering of high-temperature co-fired ceramics.
[0036]2) Prepare the slurry: weigh the aluminum nitride powder, solvent, dispersant, sintering aid, and anti-sedimentation agent according to the mass ratio, first add the anti-settling agent to the solvent, and stir in a high-speed disperser at 1500rpm / min After 0.5-1 hour, the anti-sedimentation agent is uniformly dispersed in the solvent, and then the solvent containing the anti-settling agent, aluminum ni...
specific Embodiment 1
[0072] 1) Load grinding balls: put clean alumina grinding balls into the nano sand mill, the mass ratio of grinding balls to aluminum nitride powder is 5:1;
[0073] 2) Prepare the slurry: weigh 50% aluminum nitride powder, 41.7% solvent, 1% dispersant, 0.3% sintering aid, and 1% anti-sedimentation agent according to the raw material ratio 2, and add them to the nano sand mill, mix well Form a slurry, ready for a grinding;
[0074] 3) One-time grinding: Turn on the nano sand mill for grinding, test the particle size of the slurry during the grinding process, and stop the machine when the D50 range is not greater than 1um;
[0075] 4) Configure the casting slurry: after the primary grinding, weigh 5% of the binder and 1% of the plasticizer according to the raw material ratio 2, add them to the slurry after the primary grinding, and mix evenly to form the casting slurry;
[0076] 5) Secondary grinding: the casting slurry is continuously ground in the nano sand mill, and the mac...
specific Embodiment 2
[0080] 1) Load grinding balls: put clean alumina grinding balls into the nano sand mill, the mass ratio of grinding balls to aluminum nitride powder is 5:1;
[0081] 2) Prepare the slurry: Weigh 55% aluminum nitride powder, 32.8% solvent, 2% dispersant, 0.5% sintering aid, and 1.2% anti-sedimentation agent according to the raw material ratio 3 and add them to the nano sand mill, mix well Form a slurry, ready for a grinding;
[0082] 3) One-time grinding: Turn on the nano sand mill for grinding, test the particle size of the slurry during the grinding process, and stop the machine when the D50 range is not greater than 1um;
[0083] 4) Configure the casting slurry: after the primary grinding, weigh 7% of the binder and 1.5% of the plasticizer according to the raw material ratio 3, add them to the slurry after the primary grinding, and mix evenly to form the casting slurry;
[0084]5) Secondary grinding: the casting slurry is continuously ground in the nano sand mill, and the m...
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