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Vertical square column type nanometer thermoelectric power generator for microcontroller

A technology of thermoelectric generators and microcontrollers, applied in nanotechnology, nanotechnology, nanotechnology, etc. for materials and surface science, can solve reliability problems and other problems, and achieve high reliability, high power output, and structural compact effect

Inactive Publication Date: 2018-08-24
SOUTHEAST UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

Higher and higher power consumption brings a lot of heat loss and reliability problems

Method used

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  • Vertical square column type nanometer thermoelectric power generator for microcontroller
  • Vertical square column type nanometer thermoelectric power generator for microcontroller

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Embodiment Construction

[0018] The specific embodiments of the present invention will be further described below in conjunction with the drawings.

[0019] See Figure 1-2 , The present invention proposes a vertical square column type nano thermoelectric generator for microcontroller. The N-type silicon substrate 1 is selected with a phosphorus doping concentration of 1.0E15cm-3 and a resistivity of about 2Ωcm. Before fabrication, double-sided polishing is performed, and it is immersed in a 0.55% HF acid solution to remove impurities such as metal particles. Then a tungsten layer with a thickness of 0.15um is sputtered, dry-etched and formed to form the bottom electrode 2 of the thermopile, and then a layer of polyimide layer is spin-coated, and the bottom electrode part is removed and left behind. Used to fill the gap of the lower electrode as a polyimide heat insulation layer 3. Next, a layer of polysilicon with a thickness of 2μm is grown by the LPCVD process, photoresist is coated, and the doping ...

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Abstract

The invention relates to a vertical square column type nanometer thermoelectric power generator for a microcontroller. A substrate includes an N type silicon chip, and is provided with a lower electrode of a thermopile, a polyimide thermal insulation layer, a P type arm of the thermopile, an N type arm of the thermopile, an upper electrode of the thermopile, a first silicon nitride isolation layerand a heat sink. The P type arm and the N type arm of the thermopile are connected in series via the upper and lower electrodes of the thermopile, and concretely, the thermopile is composed of a series of P type polycrystalline silicon nano wire clusters and N type nano wire clusters. The thermal conductivity of a silicon nanometer material used by the generator is much lower than that of a traditional body material, the thermoelectric power generation efficiency is improved, heat loss power generated by the microcontroller is recovered via thermoelectric conversion, higher power output is realized via lower internal resistance of the square column, the output power can reach microwatt and milliwatt level, and power supply requirements of many microsystems, especially low power equipmentnear the microcontroller, can be met.

Description

Technical field [0001] The present invention proposes a vertical square column type nano thermoelectric generator for a microcontroller, which belongs to the technical field of microelectronic mechanical systems (MEMS). Background technique [0002] With the development of information technology, the multi-core applications of processors are becoming more and more extensive, and microcontrollers also need more computationally intensive applications. This is the new challenge that microcontrollers are facing, namely power consumption and memory. Bandwidth constraints. Increasing power consumption brings a lot of heat loss, and at the same time brings reliability problems. [0003] According to the Seebeck effect, miniature thermocouples are made of different semiconductor materials. The principle is very simple. As long as there is a temperature difference between the two ends of the thermocouple, there will be continuous power output. One of the main problems that the miniature th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/14H01L35/34B82Y30/00H10N10/851H10N10/01
CPCB82Y30/00H10N10/851H10N10/01
Inventor 廖小平陈友国
Owner SOUTHEAST UNIV
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