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Automatic temperature control system and method for sample heat treatment process under ultrahigh vacuum

A technology of temperature control system and temperature control method, applied in the direction of temperature control, control/regulation system, electric controller, etc., which can solve the problems of insufficient response speed of artificial temperature regulation and inaccurate control, etc., to improve efficiency and accuracy , the effect of accurate temperature control

Pending Publication Date: 2018-08-21
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problem that the reaction speed of artificial temperature regulation in the heat treatment process under the ultra-high vacuum environment is not fast enough and the control is inaccurate, the present invention provides an automatic temperature control system and method for the sample heat treatment process under the ultra-high vacuum environment

Method used

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  • Automatic temperature control system and method for sample heat treatment process under ultrahigh vacuum
  • Automatic temperature control system and method for sample heat treatment process under ultrahigh vacuum
  • Automatic temperature control system and method for sample heat treatment process under ultrahigh vacuum

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Embodiment 1

[0043] like figure 1 As shown, an automatic temperature control system for the sample heat treatment process under ultra-high vacuum, including an optical thermometer and a vacuum gauge, and also includes a computer and a current source. The vacuum gauge is located in the ultra-high vacuum sample heating device, and the optical gauge The thermometer is installed outside the sample observation window of the ultra-high vacuum cavity, the optical thermometer and the vacuum gauge are connected to the computer, the computer is connected to the current source, and the current source is connected to the sample; wherein, the computer reads the optical thermometer through the RS232 serial port module. Readings from thermometers and vacuum gauges.

[0044] The computer collects the temperature and vacuum degree of the optical thermometer and the vacuum gauge sample, compares it with the set temperature, calculates the required heating current through the PID algorithm, controls the outp...

Embodiment 2

[0047] like figure 1 As shown, the automatic temperature control system of an ultra-high vacuum sample heat treatment process in this embodiment is further improved on the basis of Embodiment 1, and the vacuum gauge described is an Agilent UHV24P ionization vacuum gauge. With high measurement accuracy and fast response speed, it can accurately and quickly feedback the actual vacuum degree and heat treatment quality of the environment where the sample is located.

[0048] The optical thermometer is the PhotriX infrared thermometer of LumaSense Company. The measurement accuracy is high (0.01°C), the range is wide (135°C-2400°C), and the response speed is fast (1ms), which can accurately feedback the actual temperature of the sample.

[0049] The current source is Puyuan Precision Electronics DP811A programmable current source. The output current value has high accuracy (0.5mA) and rapid response (50μs), which can accurately and quickly control the actual heating power, rate an...

Embodiment 3

[0051] like figure 2 As shown, the automatic temperature control system of a kind of ultra-high vacuum sample heat treatment process of the present embodiment is further improved on the basis of embodiments 1 and 2, Matlab software is installed on the computer, and PID is constructed in Matlab software controller. Build a graphical control module in Matlab software, and the graphical control module includes an optical thermometer operation module, a sample temperature display module, a PID parameter module, a current source heating parameter setting module, a sample temperature preset module, and a heat treatment process module, current source display module, heating process display module and vacuum display module.

[0052] It has the following advantages: 1) Automatically control the sample temperature heating process to avoid repetitive labor consumption; 2) According to different samples and heat treatment process requirements, set various parameters in the heat treatmen...

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Abstract

The invention discloses an automatic temperature control system and method for a sample heat treatment process under ultrahigh vacuum, and belongs to the field of temperature control. The system comprises an optics thermodetector, a vacuum gauge, a computer and a current source, the optics thermodetector and the vacuum gauge are located in ultrahigh vacuum sampling heating equipment, an infrared thermodetector and the vacuum gauge are connected with the computer, the computer is connected with the current source, and the current source is connected with a sample. Temperature negative feedbackto current of the heated sample is utilized, thereby achieving simple, quick and accurate temperature control, an RS232 serial port is used for connecting various instruments, a temperature differencevalue between a sample temperature measured by the optics thermodetector and a preset sample temperature is calculated, and a PID algorithm is used for feeding back and setting the applied current onthe sample by the current source. Although different types of current is required for heating samples due to sizes, manufacture and the like, the system can accurately control the sample temperatureto a set temperature within 1 DEG C in half a minute.

Description

technical field [0001] The invention belongs to the field of temperature control, and more specifically relates to an automatic temperature control system and method for a sample heat treatment process in an ultra-high vacuum environment. Background technique [0002] At present, the known ultra-high vacuum (air pressure at 10 -6 -10 -10 In the range of Pa), the heating of samples (usually various single crystal substrates, such as silicon, silicon carbide, sapphire, strontium titanate, etc.) is directly heated by artificially regulated DC current source. Due to the limitation of the ultra-high vacuum environment, the corresponding temperature collection is usually measured by a non-contact optical thermometer. Due to the manual measurement of the sample temperature and adjustment of the heating current, different current adjustments will be made according to the experimental experience of different people, and the human reaction speed is not fast enough, which makes it ea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D23/27G05B11/42
CPCG05B11/42G05D23/27
Inventor 张翼宗君宇周凌杰谢学栋
Owner NANJING UNIV
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