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Laser micro-nano processing split-pupil differential confocal online monitoring integrated method and device

A differential confocal, micro-nano processing technology, applied in measurement devices, optical devices, laser welding equipment, etc., can solve problems such as only 2 microns, solve online detection problems, improve controllability, and solve drift problems and effects of high precision real-time fixed focus problems

Active Publication Date: 2020-08-04
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In terms of laser manufacturing process monitoring and quality control, in-situ monitoring and detection such as accurate judgment of the focus spot position, automatic focus and sample drift are crucial to 3D micro-nano processing, and to a certain extent determine the axial processing feature size , such as the axial monitoring method based on the triangular optical displacement sensor, the confocal microscopic imaging method based on the lateral focus monitoring, and the optical coherence tomography monitoring method, etc., the resolution capabilities of which are all in the order of μm. On-line monitoring technology research, but its monitoring resolution in the x-y-z direction is only 2 microns, and new methods are still needed to realize nano-scale monitoring and positioning

Method used

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  • Laser micro-nano processing split-pupil differential confocal online monitoring integrated method and device
  • Laser micro-nano processing split-pupil differential confocal online monitoring integrated method and device
  • Laser micro-nano processing split-pupil differential confocal online monitoring integrated method and device

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Experimental program
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Effect test

Embodiment 1

[0045] Such as figure 1 , using the split-pupil differential confocal axial monitoring module 1 to monitor the surface position of the sample 9 before processing and the axial position of the sample 9 during processing, the computer 30 monitors the two-dimensional scanner 18, the precision table 10, the axial The scanner 8 performs feedback control to realize three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9;

[0046] The split-pupil differential detector 14 is composed of a spot magnifying objective lens 25 and a two-quadrant detector 29 . The implementation steps of the integrated method of laser micro-nano processing and laser split pupil differential confocal online monitoring are as follows:

[0047] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0048] 2) Before processing, use the split-pupil differential confocal axial monitoring mo...

Embodiment 2

[0056] Such as figure 2 As shown, the sub-pupil differential detector 14 is composed of a spot magnifying objective lens 25, a detection CCD26, a first detection area 31 and a second detection area 32, wherein the first detection area 31 and the second detection area 32 are located on the image plane of the detection CCD26 above, and symmetrical about the optical axis; when using the split-pupil differential confocal axial monitoring module 1 to monitor the axial position and axial size of the sample 9 during processing, the axial monitoring parallel beam 4 passes through the dichroic mirror A5 After reflection and transmission by the dichroic mirror B6, the objective lens 7 is focused on the sample 9, and the reflected axial monitoring beam 11 reflected by the sample 9 is converged on the detector CCD26 by the reflector 12, the detection objective lens 13, and the spot enlargement objective lens 25 , the signals obtained from the first detection area 31 and the second detect...

Embodiment 3

[0059] Such as image 3 As shown, the laser space-time shaping module 16 is composed of a space shaper 34 and a time shaper 35, and adjusts the time-domain and space-domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.

[0060] All the other are identical with embodiment 1.

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Abstract

The invention belongs to the laser precision detection technology and laser micro-nano processing monitoring technology field and relates to a laser micro-nano processing light splitting pupil differential confocal online monitoring integration method and device which can be used for the laser micro-nano processing and online detection of a complex fine structure. In the invention, a long workingdistance and high axial resolution light splitting pupil laser differential confocal axial monitoring module is organically integrated with a femtosecond laser processing system. A light splitting pupil differential confocal system curve zero point is used to carry out nanoscale monitoring on the axial position of a sample so as to realize the real-time fixed focus of the axial position of the sample and the high precision measurement of a processed micro-nano structure size. A drift problem and a high-precision online detection problem in a measurement process are solved, and the controllability of micro-nano femtosecond laser processing precision, the processing quality of the sample and the like are improved. Before processing, a microscopic imaging module can be used to carry out coarse alignment and transverse position identification on the sample.

Description

technical field [0001] The invention belongs to the field of laser precision detection technology and laser micro-nano processing monitoring technology, and relates to an integrated method and device for laser micro-nano processing split-pupil differential confocal online monitoring, which can be used for laser micro-nano processing and online detection of complex micro-structures. [0002] technical background [0003] Complex microstructure components are widely used in aerospace, weapon industry, precision sensors, precision optical measurement, etc. Laser micro-nano machining is the most promising technical means for manufacturing complex microstructures. The high-resolution on-line detection of focal point and sample position is one of the key technologies to meet the requirements of nanoscale feature size and high aspect ratio processing / detection in the field of micro-nano manufacturing. [0004] In the processing of complex micro-nano structures, despite the high reso...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00B23K26/00B23K26/03B23K26/04B23K26/064
CPCB23K26/00B23K26/032B23K26/048B23K26/064G01B11/00
Inventor 赵维谦邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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