Horizontal reducing atmosphere vacuum annealing furnace

Abstract

The invention provides a horizontal reducing atmosphere vacuum annealing furnace. The horizontal reducing atmosphere vacuum annealing furnace comprises a machine frame, a furnace body, a furnace door,a furnace pipe, a thermal insulation furnace lining, a heating element, a vacuum system, an atmosphere system, a control system, a safety device and a heat dissipation device; the vacuum system and the atmosphere system are installed on the lower portion of the machine frame, and the control system is installed on the rear portion of the machine frame; and the furnace lining is provided with a high temperature zone and a low temperature zone, the high temperature zone is heated through U-shaped silicon-molybdenum bars which are arranged on the two sides, the low temperature zone is heated through FEC ceramic fiber heaters arranged in the circumferential direction, and the high temperature zone and the low temperature zone are provided with a partition plate structure. According to the horizontal reducing atmosphere vacuum annealing furnace, the furnace lining is provided with the high temperature zone and the low temperature zone, and the temperature gradient can be effectively achieved; and a light fiber material is low in thermal conductivity and small in specific gravity, so that the vacuum degree is high, the gas flow control precision is good, and the index requirements of high-grade high-precision advanced CVD process experiments are met.

Description

technical field [0001] The invention relates to the field of vacuum equipment, in particular to a horizontal reducing atmosphere vacuum annealing furnace. Background technique [0002] Atmosphere vacuum annealing furnace series equipment is mainly suitable for CVD processes such as the development of carbon nanotubes, coating of crystalline silicon substrates, controllable growth of nano-ZnO, atmosphere sintering of ceramic capacitors (MLCC), and diffusion welding of metal materials. At present, the traditional atmosphere vacuum annealing furnace is designed with a single temperature zone, which is difficult to achieve temperature gradient control and cannot meet the requirements of the CVD process; in the selection of furnace tubes, high-alumina tubes were used in the past, which have low alumina content and high temperature resistance. Poor, it is easy to crack and break the furnace tube under high temperature conditions, resulting in the process experiment can not be carr...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a horizontal reducing atmosphere vacuum annealing furnace, which overcomes the difficulty in controlling the temperature gradient of the above-mentioned traditional atmosphere vacuum annealing furnace, the phenomenon of cracking, deformation and bending of the furnace tube, and the low vacuum degree of the vacuum system and the atmosphere system. , Gas flow control accuracy is poor, it is difficult to meet the index requirements of high, precise and sharp CVD process experiments and other defects

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