Polycrystalline silicon wafer cleaning system and cleaning method thereof

Abstract

The invention discloses a polycrystalline silicon wafer cleaning system and a cleaning method thereof. The system comprises a charging station, a cleaning station and a discharging station which are connected via a conveyer, a polycrystalline silicon wafer can enters a texturing groove via the discharging station, the cleaning station is provided with a spraying device, a wiping device and a drying device sequentially, and the spraying device, wiping device and drying device are connected via the conveyer; the system further comprises a controller; and the conveyer, spraying device, wiping device and drying device are connected with the controller and controlled by the controller. The cleaning station is provided with the spraying device, wiping device and drying device, more moisture in the polycrystalline silicon surface can be evaporated, the texturing groove and chemical agents therein are polluted less, the chemical agents in the texturing groove can be used for longer time, technical time of polycrystalline silicon cells can be shortened, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a cleaning system and a cleaning method thereof, in particular to a polysilicon wafer cleaning system used before the texture making process, and belongs to the field of solar photovoltaic technology. Background technique [0002] Polycrystalline silicon solar cells are a new generation of cells that have the advantages of high conversion efficiency and long battery life of monocrystalline silicon cells and relatively simplified material preparation processes for amorphous silicon thin film cells. The manufacturing process is: 1. Cleaning and wet texturing; 2. Diffusion to make PN junction; 3. Back-etched phosphorus-silicate glass; 4. PECVD coating; 5. Screen printing electrode sintering; 6. Test packaging. [0003] In the manufacturing process of polycrystalline silicon solar cells, texturing is the first process in the production of solar cells. It has two main functions: first, texturing can remove the impurity damage layer ...

AI Technical Summary

Problems solved by technology

[0004] However, since the surface of polysilicon wafers has absorbed various impurities after slicing, grinding, chamfering, polishing and other processing steps, the current practice is to simply clean the silicon wafers with pure water, or even directly enter the texturing process without cleaning. Not only will the chemical reagents in the texturing tank be polluted, but also the cleanliness of the texturing tank will be affected, which will affect the corrosion rate of the texturing and result in poor texturing effect

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