Non-orthogonal correction method for workpiece stage and correction device
A calibration method and technology of a calibration device, applied in the field of lithography, can solve the problems of inability to meet the requirements of the whole machine, long calibration time, far less than the frequency of mirror changes, etc.
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[0034] The present invention is described in detail below in conjunction with accompanying drawing:
[0035] Such as Figure 2-4 As shown, the present invention provides a non-orthogonal correction method for a workpiece table, comprising the following steps:
[0036] S1: Set non-orthogonal measurement marks 6 on the coarse motion rotary table 7 used to carry the substrate 3 on the workpiece table 2. The non-orthogonal measurement marks 6 are provided with at least three, and are not on a straight line, so as to measure the workpiece table. 2 for on-line measurement, in this embodiment, three reflectors 4 are set on the coarse motion rotating table 7, and the three non-orthogonal measurement marks 6 are set on the three said non-orthogonal measurement marks 6 one by one On the reflecting mirror 4, there are three visual units 5 correspondingly.
[0037] S2: select three non-orthogonal measurement marks 6, move the workpiece table 2, and align the vision unit 5 with the three...
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