Method and device for measuring gas cluster ion beam mass spectra

A technology of gas clusters and measuring devices, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of large TOF mass spectrometry errors, failure to meet research requirements, low resolution, etc., to reduce time constants, improve response sensitivity, Effects of Improving Mass Spectrometry Resolution

Active Publication Date: 2018-02-09
付德君
View PDF6 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with the current equipment, a standard oscilloscope is usually used to directly measure the Faraday cup signal, the time constant τ = 1000000Ω × 150pF = 150μs, and the drift time t is generally t...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and device for measuring gas cluster ion beam mass spectra
  • Method and device for measuring gas cluster ion beam mass spectra
  • Method and device for measuring gas cluster ion beam mass spectra

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0043] The present invention will be further described below in conjunction with drawings and embodiments.

[0044] The invention provides a method for measuring gas cluster ion beam mass spectrometry, referring tofigure 1 , including the following steps:

[0045] (1) Utilize the accelerator to generate cluster ions, and the cluster ions are passed through the beam guide device 2 provided with an intermittently closed steady electric field, i.e. the deflection plate (electrostatic capacitor), and the internal electric field is 2-10kV / m. When the constant electric field is turned on, the Coulomb force is sufficient to deflect all cluster ions, and the cluster ions are deflected; when the constant electric field is turned off, the cluster ions are ejected in a straight line, and the electric field is intermittently turned off. The time for intermittently turning off the electric field is about 10 to 30 μs. 2kHz, the continuous cluster beam 1 forms the initial ion beam pulse 3 af...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides a method for measuring gas cluster ion beam mass spectra. Cluster ions form a pulsed ion beam through an electrostatic capacitor, the pulsed ion beam is sprayed to a Faraday cupconnected to a field effect transistor (FET) source follower, and an oscilloscope is used to measure signals generated by cluster ions of different masse respectively in the pulsed ion beam, and TOFmass spectra of the cluster ions are obtained by TOF mass spectrometry. The invention also provides a device for measuring gas cluster ion beam mass spectra based on the measuring method. The device includes the Faraday cup for receiving the pulsed ion beam, the FET source follower connected with the Faraday cup and the oscilloscope. According to the method, by taking a field effect transistor asthe source follower and adopting the special design of directly connecting the field effect transistor with the Faraday cup, a time constant of a detector is reduced, so that detector response sensitivity is effectively improved, the mass spectrum resolution is improved, and the perfect ion beam mass spectra are obtained.

Description

technical field [0001] The invention relates to a measurement method and device for gas cluster ion beam mass spectrometry, belonging to the technical field of gas cluster ion beam measurement. Background technique [0002] A cluster is a particle containing several to thousands of atoms, belonging to the sub-nanometer or nanometer scale, and can be produced in solid, liquid, and gaseous substances. When a cluster ion beam with a certain speed interacts with a solid surface, it will produce significantly different effects from monatomic ions and molecular beams: high mass-to-charge ratio, lateral sputtering effect, multiple scattering phenomenon, and in the same ion In the case of beam current, cluster ions can transport more substances. The lateral sputtering effect is beneficial to the smoothing of the sample surface, and the high mass-to-charge ratio can effectively reduce the Coulomb repulsion energy between particles during the transport process. Therefore, cluster io...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N27/68
CPCG01N27/68
Inventor 付德君瓦西里·帕里诺维奇曾晓梅
Owner 付德君
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap