Excimer laser polishing and detection method of porous ceramics

An excimer laser, porous ceramic technology, applied in laser welding equipment, metal processing equipment, welding equipment and other directions, can solve the problems of reducing the recognition degree of the outer part of the porous ceramic surface pores, and the limited detection degree of the convex part of the ceramic surface, reaching the Improve recognition and accuracy, reduce the impact of detection, and the effect of large laser single photon energy

Active Publication Date: 2019-05-14
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Affected by a large number of pores distributed on the surface of porous ceramic materials, the calculation result is limited to the degree of detection of the convex part of the ceramic surface, which reduces the recognition degree of the detection of the flatness of the outer part of the pores on the porous ceramic surface

Method used

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  • Excimer laser polishing and detection method of porous ceramics
  • Excimer laser polishing and detection method of porous ceramics
  • Excimer laser polishing and detection method of porous ceramics

Examples

Experimental program
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Embodiment 1

[0031] A method for excimer laser polishing of porous ceramics, comprising the steps of:

[0032] ① if figure 1 As shown, use the Zygo surface roughness analysis equipment to scan the contour of the SiC porous ceramic surface to be processed, and use it as a reference line (1) Divide a certain length of contour into two parts, so that the distance between the baseline and the lower part of the contour line and the reference line The included areas are equal, the upper part is defined as the peak value (2), and the lower part is the valley value (3). The average pore size (4) of the porous ceramic surface is measured to be about 15 μm, and the pore spacing (5) is about 50 μm.

[0033] ② if figure 2 As shown, the ArF excimer laser beam is sequentially passed through the beam homogenizer (6) and the focusing lens (7) to realize the focusing and homogenization of the laser beam to obtain a uniform beam (8). According to the pore size (4) and pore size of the porous ceramic The ...

Embodiment 2

[0037] On the basis of above-mentioned embodiment 1, also disclose a kind of roughness detection method before and after the excimer laser polishing of porous ceramics, comprise the step ①-④ in embodiment 1, also comprise following steps in addition:

[0038] ⑤Analyze the profile of the porous SiC ceramic surface to be processed obtained by scanning in step ①, record the average distance between the baseline (1) and the valley (3), and use the formula The surface convex roughness r=ra=0.96 μm of porous SiC ceramics before polishing was calculated.

[0039] ⑥ Use the Zygo surface roughness analysis equipment to scan the surface profile of porous SiC ceramics after polishing, such as image 3 As shown, the average distance between the baseline (1) and the valley (12) is the average distance before polishing, which is approximately 0.96 μm in the experiment. According to the peak (13) area of ​​the surface profile above the reference line, the projected roughness of the porous Si...

Embodiment 3

[0041] A roughness detection method before and after polishing of porous ceramics, comprising the following steps:

[0042] S1 analyzes the surface profile of porous ceramics before polishing, takes the reference line as the x-axis, establishes a rectangular coordinate system perpendicular to the reference line as the y-axis, and records the average distance y between the reference line and the valley 0 , to calculate the surface convex roughness of porous ceramics before polishing Where l is the sampling length, and y is the distance between the contour above the baseline and the baseline;

[0043] S2 analyzes the surface profile of porous ceramics after polishing, and makes a reference line so that the average distance from the valley is y 0 +y', where y' is the change value of the pore depth before and after polishing, and y' is approximately 0 when the incident angle is large; according to the peak area and sampling length of the porous ceramic surface profile above the ...

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Abstract

The invention discloses an excimer laser polishing and detecting method of a porous ceramic. The excimer laser polishing and detecting method of the porous ceramic comprises the following steps that surface outline of to-be-processed surface of the porous ceramic is scanned by utilizing surface roughness analyzing equipment, focusing and homogenization of an excimer laser beam are achieved by using a light beam homogenizer and a focusing lens, the defocusing distance of the excimer laser used for polishing is determined, a scanning route of the surface is planned, parameters of the excimer laser are adjusted, the ablation threshold Fth of the porous ceramic is measured, output energy of the excimer laser is adjusted to conduct polishing on the porous ceramic, the surface bulge roughness of the porous ceramic before polishing is calculated, and the surface bulge roughness of the porous ceramic after polishing is calculated. According to the excimer laser polishing and detecting method of the porous ceramic, thermal influence on the porous ceramic is little, problems of peeling off and brittle fracture of ceramic material particles do not occur, the sizes and shape of polishing materials are not required, polishing of thin films, curved faces even internal structures can be achieved, and the identification degree and precision of the polishing effect of the porous ceramic is improved.

Description

technical field [0001] The invention relates to the field of laser processing, in particular to the polishing of porous ceramics. Background technique [0002] Porous ceramics have the characteristics of good permeability, low density, high hardness, good wear resistance, and low thermal conductivity. They can achieve weight loss, heat insulation, sound absorption, filtration, and catalysis. , optoelectronics, energy, biology and many other fields are widely used. The high hardness and brittleness of ceramic materials make it difficult to process, but the surface roughness of porous ceramics affects the surface adhesion, permeability, vibration and noise performance of porous ceramic parts, especially for porous ceramic bearings and bushings , electron-emitting devices, etc., which directly affect important parameters such as rotational noise and film bonding ability. [0003] The commonly used ceramic polishing methods include mechanical method, chemical method, laser pol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/00B23K26/352B23K26/402
CPCB23K26/352B23K26/3576B23K26/402
Inventor 郭馨王宇丁金滨刘斌张立佳周翊赵江山齐威
Owner RAINBOW SOURCE LASER RSLASER
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