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Manufacturing method of micro lens array

A technology of microlens arrays and microlenses, which is applied in the fields of lenses, optics, instruments, etc., can solve the problems of low processing precision and long processing cycle of microlens arrays, and achieve the effects of reducing production costs, improving production efficiency, and high precision

Inactive Publication Date: 2017-11-17
HENAN POLYTECHNIC UNIV
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Problems solved by technology

[0004] Aiming at the disadvantages of long processing cycle and low processing precision of the existing mold transfer printing microlens array, the present invention proposes a method of using rapid self-assembled magnetic colloidal particles as a mask to make a mold by deposition process and process the microlens array by transfer printing method

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  • Manufacturing method of micro lens array
  • Manufacturing method of micro lens array
  • Manufacturing method of micro lens array

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Embodiment Construction

[0018] In this embodiment, a single layer of magnetic colloid particles is used as a mask, and an electrodeposition process is used to manufacture a microlens master mold. The embodiment will be described below with reference to the accompanying drawings.

[0019] (1) A magnetic field is used to induce self-assembled magnetic colloidal particle 2 monolayer film on the substrate 1 . A material with a smooth surface is selected as the substrate 1, and the substrate 1 is cleaned and dried alternately with organic solvents (such as acetone, ethanol) and distilled water. A certain amount of suspension of magnetic colloidal particles 2 is drop-coated on the substrate 1, and the substrate 1 is placed in a magnetic field and dispersed by ultrasonic vibration. The magnetic colloidal particles 2 are polarized into magnetic dipoles under the action of the magnetic field, and the magnetic dipoles are arranged in an orderly manner on the substrate 1 through the interaction of the static ma...

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Abstract

The present invention provides a manufacturing method of a micro lens array. The method comprises the following steps that: (1) a single-layer film of magnetic colloidal particles 2 is self-assembled on a substrate 1 by means of a magnetic field induced self-assembling method; (2) with the magnetic colloidal particles 2 adopted as a mask, an electro-deposition process is adopted to obtain a deposited layer; (3) polymer 4 is poured on the magnetic colloidal particles 2 and the deposited layer 3, after being solidified, the polymer 4 is peeled off, and therefore, a micro lens female mold 5 can be obtained; and (4) polymer 6 is poured on the micro lens female mold 5, the polymer 6 is solidified, so that a micro lens array 7 can be obtained through molding. According to the method of the invention, the size of the mold is changed by adjusting the thickness of the deposited layer and the size of the particles, and therefore, the size of the micro lens array can be controlled. The manufacturing method of the invention has the advantages of simple process, adjustable parameters, low production cost, reusable mold, high processing precision, high uniformity and the like.

Description

technical field [0001] The invention relates to a method for manufacturing a microlens array, and belongs to the technical field of micro-nano structure preparation. Background technique [0002] In recent years, with the development of Micro-Opto-Electro-Mechanical System (MOEMS, Micro-Opto-Electro-Mechanical System), micro-optical components used in MOEMS have received more and more attention and research, and a component that plays an important role in MOEMS is Small physical strength, light weight, easy integration and arrayed microlens array. A microlens array is a micro-optical device composed of a series of lenses of the same size arranged in a certain period, and the size of each microlens is between a few microns and a few millimeters. Microlens arrays are widely used in beam shaping, device interconnection, three-dimensional imaging, optical switches, optical communications, etc. , fiber coupling and other fields. [0003] At present, there are many methods that...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00
CPCG02B3/0031
Inventor 秦歌周奎闫亮张云燕刘凯瑞明平美
Owner HENAN POLYTECHNIC UNIV
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