InGaN photon monolithic integration based multi-dimensional space visible light communication system
A technology of visible light communication and monolithic integration, which is applied in the field of visible light communication, can solve the problems of large spectrum and spectrum resources and inability to reverse communication, etc., and achieve the effects of improving transmission capacity, saving equipment resource consumption, and reducing information distortion and distortion
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[0022] The invention will be described in further detail below in conjunction with the accompanying drawings.
[0023] figure 1 The chip front view of the InGaN-based multi-dimensional visible light communication of the present invention is given. The chip is based on a silicon-based nitride material, and from bottom to top is a silicon substrate layer 1, an epitaxial buffer layer 2, a pure GaN layer 3, an n-electrode 5, and a floating p-n junction quantum well device; the p-n junction quantum well The device includes an n-GaN layer 4, an InGaN / GaN multiple quantum well 6, a p-GaN layer 7, and a p-electrode 8 from bottom to top. There is an etched stepped mesa on the upper surface of the n-GaN layer 4, the stepped mesa includes a lower mesa and an upper mesa, the n-electrode 5 is arranged on the lower mesa, and the upper mesa is more The bottom surfaces of the quantum wells 6 are connected; after the n-GaN layer 4 is peeled off through the back substrate layer 1 and thinned,...
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