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Frequency detection method based on resonator synchronization oscillation and inclination angle sensor thereof

An inclination sensor and frequency detection technology, applied in the direction of measuring inclination, using electric/magnetic devices to transmit sensing components, instruments, etc., can solve the problems of inaccurate measurement of microgravity changes, etc., to achieve inclination measurement, easy integration, The effect of low noise floor

Active Publication Date: 2017-09-19
XI AN JIAOTONG UNIV
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Problems solved by technology

In most cases, the resonant frequency change caused by the weak acceleration of gravity is submerged in the noise floor of the closed-loop oscillator, which makes it impossible to accurately measure the change of microgravity

Method used

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  • Frequency detection method based on resonator synchronization oscillation and inclination angle sensor thereof
  • Frequency detection method based on resonator synchronization oscillation and inclination angle sensor thereof
  • Frequency detection method based on resonator synchronization oscillation and inclination angle sensor thereof

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Embodiment Construction

[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0024] see figure 1 , a MEMS full-range inclination sensor based on synchronous oscillation frequency detection, including a single crystal silicon substrate 01 with a thickness ranging from 400um to 1000um, and a layer of silicon dioxide insulating layer 02 grown on the single crystal silicon substrate 01 with a thickness ranging from 2- 3um, the silicon dioxide insulating layer 02 is provided with a single crystal silicon structure layer 03, and its thickness ranges from 10-25um.

[0025] see figure 2 , the single crystal silicon structure layer 03 is the core part of the sensor, which is composed of four modules: a mass block 1 , an amplifying beam 2 , a detection element 3 and a synchronization element 4 . The function of the mass block 1 is to sense the in-plane gravitational acceleration, and convert the acceleration into pressure or tension and appl...

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Abstract

A frequency detection method based on resonator synchronization oscillations and an inclination angle sensor thereof are provided; detection elements and a synchronization element are respectively placed in a first and second oscillation circuits so as to form two self excited oscillators; the detection elements and the synchronization element are coupled through a plate capacitor, so weak synchronization current can pass through, thus affecting and reducing the detection element oscillator phase noises, and greatly improving the frequency stability; the fixed frequency can be read through a frequency counter; the three detection elements are evenly distributed around a hexagon mass block respectively through an amplification beam; the mass block is used for sensing the gravitational acceleration and applying tension force on the amplification beams; the amplification beams amplify and transfer the force to the detection elements, thus changing the self-excited oscillation frequency, and forming synchronization self-excited oscillation; the oscillation frequencies and changes of three synchronization self-maintained circuits can be detected, thus inversing the acceleration size and direction received by the whole device.

Description

【Technical field】 [0001] The invention relates to the technical field of inclination sensors, in particular to a frequency detection method based on synchronous oscillation of a resonator and an inclination sensor thereof. 【Background technique】 [0002] The importance of inclination sensors, especially high-precision full-range inclination sensors, is self-evident. The three fields of high-end CNC machine tools and robots, aerospace equipment, and high-performance medical devices are closely related to sensors, especially high-precision inclination sensors. It can be said that the realization of high-precision full-range inclination sensors is one of the important conditions for building a manufacturing power . [0003] As a high-precision sensor, the resonant MEMS inclination sensor has been favored and valued by researchers from all over the world. It is generally composed of a sensitive element, a resonant element and a signal processing circuit. The sensitive element ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/30G01D5/24
CPCG01B7/30G01D5/24G01C9/06G01P15/125G01P15/18
Inventor 韦学勇翁寅生王曙东浦东蒋庄德
Owner XI AN JIAOTONG UNIV
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