Manufacturing method of diamond like carbon vibrating diaphragm and loudspeaker
A production method and technology of vibrating film, which is applied in the production of diamond-like carbon vibrating film and the field of loudspeakers, can solve the problems of complex process steps and devices, difficulty in guaranteeing adhesion, peeling off, etc., and achieve simplified process and excellent high-frequency performance Effect
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specific Embodiment approach 1
[0042] A voltage of 6.5 kilovolts is provided, and a distance of 1.5 centimeters is maintained between the outlet 332 of the nozzle 33 of the atmospheric pressure plasma chemical vapor deposition device and the substrate 1, which can dissociate more than 95% of the carbon-containing gas, and the carbon ion in the plasma state Density reaches about 10 12 , scanning moving speed 200mm / s, scanning back and forth, the thickness of the formed DLC film is 20 nanometers, scanning two back and forth, the thickness of the formed DLC film is 40 nanometers, scanning three back and forth, the thickness of the formed DLC film is 60 nanometers Nano.
specific Embodiment approach 2
[0044] A voltage of 5 kV is provided, and a distance of 1.5 centimeters is maintained between the outlet 332 of the nozzle 33 of the atmospheric pressure plasma chemical vapor deposition device and the substrate 1, which can dissociate more than 90% of the carbon-containing gas, and the carbon ion in the plasma state The density reaches about 10 11 , scanning moving speed 150mm / s, scanning back and forth, the thickness of the formed DLC film is 20 nanometers, scanning two back and forth, the thickness of the formed DLC film is 40 nanometers, scanning three back and forth, the thickness of the formed DLC film is 60 nanometers Nano.
specific Embodiment approach 3
[0046] A voltage of 10 kV is provided, and a distance of 1.5 centimeters is maintained between the outlet 332 of the nozzle 33 of the atmospheric pressure plasma chemical vapor deposition device and the substrate 1, which can dissociate about 99% of the carbon-containing gas, and the carbon ion in the plasma state Density reaches about 10 13 , scanning moving speed 250mm / s, scanning back and forth, the thickness of the formed diamond-like carbon film is 20 nanometers, scanning two back and forth, the thickness of the formed diamond-like carbon film is 40 nanometers, scanning three back and forth, the thickness of the formed diamond-like carbon film is 60 nanometers Nano.
[0047] In this embodiment, the thickness of the substrate 1 is between 9 microns and 50 microns. If it is lower than 9 microns, the substrate is easily broken down during the coating process; if it is higher than 50 microns, it is not suitable for use as a diaphragm.
[0048] The relationship between the t...
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