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Efficient thermoelectric conversion characteristic ZnSb based thin film and preparing method thereof

A thermoelectric conversion and thin film technology, applied in vacuum evaporation coating, coating, sputtering coating and other directions, can solve the problem of low thermoelectric characteristics of ZnSb-based thin films, and achieve the effect of improving thermoelectric characteristics and optimizing film structure

Active Publication Date: 2017-06-27
SHENZHEN UNIV
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  • Application Information

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Problems solved by technology

[0007] In view of the above deficiencies in the prior art, the object of the present invention is to provide a ZnSb-based thin film with high-efficiency thermoelectric conversion properties and a preparation method thereof, aiming at solving the problem of low thermoelectric properties of the existing ZnSb-based thin film

Method used

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  • Efficient thermoelectric conversion characteristic ZnSb based thin film and preparing method thereof
  • Efficient thermoelectric conversion characteristic ZnSb based thin film and preparing method thereof
  • Efficient thermoelectric conversion characteristic ZnSb based thin film and preparing method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0038] The ZnSb-based thin film was prepared by magnetron co-sputtering technology. First, the Sb and Zn targets with a purity of 99.99% were respectively fixed on the two station target racks of the sputtering system; BK7 optical glass was used as the substrate, and the BK7 The optical glass is placed in a container and ultrasonically cleaned with acetone, alcohol and deionized water in sequence; the background vacuum of the sputtering system is pumped to 6.0×10 -4 Pa, the inlet flow rate is 6sccm high-purity Ar gas, and the working pressure is controlled at 6.0×10 -2 Pa; increase the power of the magnetron sputtering system to deposit Sb and Zn on the BK7 optical glass, and the co-sputtering deposition time is 30min.

[0039] After the deposition is completed, the ZnSb-based thin film sample is fixed on the bombardment station frame of the plasma beam bombardment system; the vacuum degree of the plasma beam bombardment system is pumped to 6.0×10 -4 Pa, the flow rate is 10 s...

Embodiment 2

[0042] The difference from Example 1 is that the plasma beam is replaced by nitrogen gas.

Embodiment 3

[0044] The difference from Example 1 is that the plasma beam energy is changed to 0.1 KeV.

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Abstract

The invention discloses an efficient thermoelectric conversion characteristic ZnSb based thin film and a preparing method thereof. The method includes the following steps that plasma beams are adopted, bombardment is carried out on an original ZnSb based thin film, and the efficient thermoelectric conversion characteristic ZnSb based thin film is obtained by controlling the plasma beam bombardment parameter. According to the efficient thermoelectric conversion characteristic ZnSb based thin film and the preparing method, the plasma beams are adopted for bombardment of the thin film, a traditional heat treatment process is replaced, and chemical components of thin film key factors can be guaranteed; and meanwhile, microstructures of the ZnSb based thin film can be controlled; and through effective thin film structural optimization, thermoelectric characteristics of the ZnSb based thin film are improved accordingly.

Description

technical field [0001] The invention relates to the field of thermoelectric functional materials, in particular to a ZnSb-based thin film with high-efficiency thermoelectric conversion characteristics and a preparation method thereof. Background technique [0002] With the survival and development of human beings, energy consumption is increasing rapidly, and the environmental pollution problems caused by traditional energy use are becoming increasingly serious. The use of renewable energy and industrial waste heat has extremely important practical significance for energy saving and environmental protection. The development of green new energy technology has attracted widespread attention and attention from all over the world. As a new energy material, thermoelectric material can directly convert heat energy and electric energy into each other without the operation of mechanical parts and media, and does not require chemical reactions. It is the same as secondary energy sour...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/18C23C14/35C23C14/46
CPCC23C14/185C23C14/35C23C14/46
Inventor 郑壮豪范平梁广兴罗景庭
Owner SHENZHEN UNIV
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