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A switch device for lithium battery protection and manufacturing method thereof

A technology for switching devices and manufacturing methods, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of large resistance and large area in the drift region of MOSFETs, achieve low on-state resistance and improve stability , to ensure the effect of constant pressure

Active Publication Date: 2020-04-03
中微半导体(深圳)股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a switching device for lithium battery protection and its manufacturing method, which is used to solve the large internal resistance of the drift region and the area of ​​the MOSFET for lithium battery protection in the prior art. bigger problem

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  • A switch device for lithium battery protection and manufacturing method thereof
  • A switch device for lithium battery protection and manufacturing method thereof
  • A switch device for lithium battery protection and manufacturing method thereof

Examples

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Embodiment 1

[0058] Such as Figure 2 to Figure 13 As shown, this embodiment provides a manufacturing method for a switching device for lithium battery protection, the manufacturing method includes steps:

[0059] Such as figure 2 As shown, step 1) is performed first, providing a P+ type substrate 101, and forming a P− type epitaxial layer 102 on the surface of the P+ type substrate 101.

[0060] Specifically, the doping concentration of the P+ type substrate 101 is 1e18-1e19 / cm 3 , using an epitaxial method to form a P-type epitaxial layer 102 on the surface of the P+ type substrate 101, and the doping concentration of the P-type epitaxial layer 102 is 1e16-1e17 / cm 3 .

[0061] Such as image 3 As shown, then proceed to step 2), define a body contact region, form a first trench in the body contact region up to the P+ type substrate, and fill the first trench with an insulating medium 140 .

[0062] Specifically, a photolithography-etching process is first used to define a body conta...

Embodiment 2

[0086] Such as Figure 14 As shown, this embodiment provides a method for manufacturing a switching device for lithium battery protection, the basic steps of which are as in Embodiment 1, wherein the difference from Embodiment 1 is that step 3) of this embodiment includes:

[0087] Step 3-1), making a mask on the P-type epitaxial layer 102;

[0088] Step 3-2), forming an N-type well region 103 in the P-type epitaxial layer 102 by ion implantation based on a mask, so that the gap between the N-type well region 103 and the subsequently prepared body region electrode 120 is The P-type epitaxial layer 102 is isolated.

[0089] Such as Figure 12 As shown, this embodiment also provides a switching device for lithium battery protection, the basic structure of which is the same as that of Embodiment 1, wherein the difference from Embodiment 1 lies in: the N-type well region 103 and the body region The electrodes 120 are isolated by the P-type epitaxial layer 102 .

[0090] Since ...

Embodiment 3

[0092] Such as Figure 15 As shown, this embodiment provides a method for manufacturing a switching device for lithium battery protection, the basic steps of which are as in embodiment 1, wherein the difference from embodiment 1 is that step 1) is also included in the P- The step of forming an isolation trench in the type epitaxial layer 102, and the insulating medium in step 2) is simultaneously filled in the isolation trench to form an STI isolation region 121, and the STI isolation region 121 is located between the two gate structures 104 fabricated subsequently , and the N-type drift region 106 prepared subsequently is surrounded by the STI isolation region 121 .

[0093] Such as Figure 15 As shown, this embodiment also provides a switching device for lithium battery protection, its basic structure is as in embodiment 1, wherein, the difference from embodiment 1 is that: the P-type epitaxial layer 102 is also formed with The STI isolation region 121 is located between t...

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Abstract

The invention provides a switching device for lithium-ion battery protection and a manufacturing method thereof. The switching device comprises a P+ type substrate, a P-type epitaxial layer, a first insulating groove formed in the body contact region, an N type well region, two P type well regions, two gate structures, a shared N- type drift region formed between the two gate structures, an N type source region, a P+ type contact region, a dielectric layer and an electrode material, wherein two source region contact windows and a body region contact window are formed in the dielectric layer, an insulating medium in the body region contact window is removed to form a second groove, and the insulating medium is reserved on the side wall of the second groove; the source region contact windows, the body region contact window and the second groove are filled with the electrode material. The MOSFET device is constructed in a mode of sharing a drift region, the region resistance in the drift region is greatly reduced, and meanwhile withstand voltage is kept unchanged; one source region electrode is introduced into the back face of a chip, and device internal resistance can be effectively reduced; the insulating medium on the side wall of the body region electrode can effectively reduce leakage currents and increase withstand voltage.

Description

technical field [0001] The invention relates to a lithium battery protection circuit, in particular to a switching device for lithium battery protection and a manufacturing method thereof. Background technique [0002] With the advancement of science and technology and social development, portable devices such as mobile phones, notebook computers, MP3 players, PDAs, handheld game consoles, and digital cameras have become more and more popular. Many of these products are powered by lithium-ion batteries. Lithium-ion batteries It is divided into two types: primary battery and secondary battery. At present, non-rechargeable primary lithium batteries are mainly used in some portable electronic products with low power consumption, while notebook computers, mobile phones, PDAs, digital cameras, etc. consume a lot of power. Rechargeable secondary batteries, namely lithium-ion batteries, are used in electronic products. [0003] Compared with nickel-cadmium and nickel-metal hydride...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/8234H01L27/088
CPCH01L21/823418H01L21/823481H01L27/088
Inventor 王凡
Owner 中微半导体(深圳)股份有限公司
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